Published Journals 2011

1 bis 10 von 19 Einträgen

Kubasch, C.; Schumacher, H.; Ruelke, H.; Mayer, U.; Bartha, J.W.: Fourier Transform Infrared Spectroscopy of Moisturized Low-k Dielectric Materials. In: Electron Devices, IEEE Transactions on 58 (2011), Nr. 9, S. 2888–2894

Sauer, S.; Marschner, U.; Adolphi, B.; Fischer, W.-J.: Passive Wireless Resonant Galfenol Sensor for Osteosynthesis Plate Bending Measurement. In: IEEE Sensors Journal 2011 12 (2011), Nr. 5, S. 1226–1233

Hufenbach, W.; Adam, F.; Fischer, W.-J.; Kunadt, A.; Weck, D.: Mechanical behavior of textile-reinforced thermoplastics with integrated sensor network components. In: Material and Design 32 (2011), Nr. 10, S. 4931–4935

He, J.; Richter, K.; Bartha, J.W.; Howitz, S.: Fabrication of silicon template with smooth tapered sidewall for nanoimprint lithography. In: J. Vac. Sci. Technol., Seiten 06FC16-1 bis 06FC16-5 B 29(6) (2011)

Bott, S.; Rzehak, R.; Vasilev, B.; Kücher, P.; Bartha, J.W.: A CMP Model Including Global Distribution of Pressure. In: IEEE Transactions on Semiconductor Manufacturing 24 (2011), Nr. 2, S. 304–314

Vasilev, B.; Rzehak, R.; Bott, S.; Kücher, P.; Bartha, J.W.: Greenwood-Williamson Model Combining Pattern-Density and Pattern-Size Effects in CMP. In: IEEE Transactions on Semiconductor Manufacturing 24 (2011), Nr. 2, S. 338–347

Berndt, D.; Heber, J.; Sinning, S.; Rudloff, D.; Wolschke, S.; Eckert, M.; Schmidt, J.U.; Bring, M.; Wagner, M.; Lakner, H.: Calibration of diffractive micromirror arrays for microscopy applications. In: Proceedings of SPIE 8191 (2011), S. 819110O–1–819110O–9

Parshina, L.S.; Novodvorsky, O.A.; Panchenko, V.Ya.; Khramova, O.D.; Cherebilo, Ye.A.; Lotin, A.A.; Wenzel, C.; Trumpaicka, N.; Bartha, J.W.: Photoluminescent properties of nitrogen and phosphorus doped ZnO thin films fabricated by pulsed laser deposition method. In: Laser Physics issue 4 21 (2011), Nr. 4, S. 790–795

Kirchner, R.; Adolphi, B.; Landgraf, R.; Fischer, W.-J.: Antisticking Layers on Antireflective Chromium for Hybrid (CNP) Nanoimprint Molds. In: Proc. SPIE 7545 (2011), S. 7545

Kirchner, R.; Teng, L.; Lu, B.; Adolphi, B.; Fischer, W.-J. : Degradation of Perfluorotrichlorosilane Antisticking Layers: The Impact on Mold Cleaning, UVNanoimprinting, and Bonded UV-Nanoimprint Molds. In: Jpn. J. Appl. Physics 50 (2011), S. 6–13

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Philipp Wenskus
Last modified: Sep 22, 2016