Veröffentlichte Journale 2011

11 bis 19 von 19 Einträgen

Kirchner, R.; Finn, A.; Teng, L.; Plötner, M.; Jahn, A.; Nueske, L.; Fischer, W.-J.: UV-Nanoimprinting Using Non-Transparent Molds and Non-Transparent Substrates. In: Microelectronic Engineering, 88(8):20042008, August 2011 (2011), S. 1–5

Finn, A.; Schossig, M.; Norkus, V.; Gerlach, G.: Microstructured Surfaces on LiTaO3-Based Pyroelectric Infrared Detectors. In: IEEE Sensors Journal, 11(10):22042211, October 2011 (2011)

Pügner, T.; Knobbe, J.; Lakner, H.: Basic angles in microelectromechanical system scanning grating spectrometers. In: Applied Optics 50 (2011), Nr. 24, S. 4894–4902

Wojcik, H.; Merkel, U.; Jahn, A.; Richter, K.; Junige, M.; Klein, C.; Gluch, J.; Albert, M.; Munnik, F.; Wenzel, C.; Bartha, J.W.: Comparison of PVD, PECVD & PEALD Ru(-C) films as Cu diffusion barriers by means of bias temperature stress measurements. In: Microelectronic Engineering 88 (2011), Nr. 5, S. 641–645

Suchaneck, G.; Labitzke, R.; Adolphi, B.; Jastrabik, L.; Kiselev, D.; Kholkin, A.; Gerlach, G.; Dejneka, A.: Deposition of PZT thin film onto copper-coated polymer films by mean of pulsed-DC and RF-reactive sputtering. In: Surface & Coatings Technology 205 (2011) (2011), S. 241–244

Kirchner, R.; Kaiser, M.-K.; Adolphi, B.; Fischer, W.-J.: Chemical functional polymers for direct UV assisted nanoimprinting of polymeric photonic microring resonators. In: Phys. Status Solidi A (2011), S. 1–7

Strehle, S.; Menzel, S.; Wetzig, K.; Bartha, J.W.: Microstructure of electroplated Cu(Ag) alloy thin films. In: Thin Solid Films 519 (2011), Nr. 11, S. 3522–3529

Strehle, S.; Schmidt, D.; Albert, M.; Bartha, J.W.: Growth of the Initial Atomic Layers of Ta-N Films During Atomic Layer Deposition on Silicon-Based Substrates. In: Chemical Vapor Deposition 17 (2011), S. 37–44

Ispas, A.; Peipmann, R.; Adolphi, B.; Efimov, I.; Bund, A.: Electrodeposition of pristine and composite poly(3,4-ethylenedioxythiophene) layers studied by electro-acoustic impedance measurements. In: Electrochimica Acta 56 (2011) (2011), S. 3500–3506

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Philipp Wenskus
Letzte Änderung: 22.09.2016