Publications 2010

51 bis 60 von 65 Einträgen

Estel, K.; Künzelmann, U.; Bartha, J.W.; Mayer, E.-P.; Barthel, H.: Influence of Ionic Strength and pH-Value on the Silicon Dioxide Polishing Behaviour of Slurries based on Pure Silica Suspensions. In: Advanced Interconnects and Chemical Mechanical Planarization for Micro- and Nanoelectronics, MRS Spring Meeting 2010, San Francisco, CA, 5. - 7. April 2010 Materials Research Society - Symposium Proceedings, 1249 (2010), S. 97–102

Künzelmann, U.; Schumacher, H.; Bartha, J.W.: In situ-ATR-FTIR-Untersuchungen zur Wirkungsweise von Additiven in TSV-Cu-Elektrolyten. In: Industriepartnersymposium, Dresden, 30. Sept. 2010 Poster (2010)

Estel, K.; Künzelmann, U. ; Bartha, J.W.; Mayer, E.-P.; Barthel, H.: Influence of Ionic Strengths and pH-Values of Model-Slurries for Chemical Mechanical Silicon Dioxide Polishing with different Nanodispersed Pure Silica Suspensions. In: Nanofair 2010, Dresden, 6.-7. Juli 2010 Poster (2010)

Schumacher, H.; Künzelmann, U.; Vasilev, B.; Eichhorn, K.-J.; Bartha, J.W.: Applications of Microstructured Silicon Wafers as Internal Reflection Elements in Attenuated Total Reflection Fourier Transform Infrared Spectroscopy. In: Applied Spectroscopy 64 (2010), Nr. 9, S. 1022–1027

Geidel, M.; Knaut, M.; Albert, M.; Bartha, J.W.: In-situ XPS study on the growth of ultra-thin Al-O and Ti-O based films with atomic layer deposition. In: E-MRS 2010 Spring Meeting in Strasbourg, 07.06.2010-11.06.2010 Poster (2010)

Kubasch, C.; Klaus, C.; Ruelke, H.; Mayer, U.; Bartha, J.W.: Investigation of Moisture Uptake in Low-k Dielectric Materials. In: IEEE Transaction on Electron Devices 57 (2010), Nr. 8, S. 1865–1872

Strobel, C.; Leszczynska, B. ; Zimmermann, T.; Albert, M.; Bartha, J.W.; Kuske, J.: Dynamic VHF-PECVD concept tool with linear plasma sources for silicon based thin film solar cells. In: Proceedings of the 25th European Photovoltaic Solar Energy Conference, Valencia, 2010 (2010)

Haubner, K.; Murawski, J.; Olk, P.; M., Lukas; Ziegler, C.; Adolphi, B.; Jaehne, E.: The Route to Functional Graphene Oxide. In: ChemPhysChem (2010)

Adolphi, B.; McCord, J.; Bertram, M.; Oertel, C.-G.; Merkel, U.; Marschner, U.; Schäfer, R.; Wenzel, C.; Fischer, W.-J.: Improvement of Sputtered Galfenol Thin Films for Sensor Applications. In: Smart Mater. Struct. 19 (2010) 055013 (2010)

Starke, Eric: Kombinierte Simulation - eine weitere Methode zur Optimierung elektromechanischer Systeme. Dresden : TUDpress Verlag der Wissenschaften Dresden; Auflage: 1., Auflage (Februar 2010) (2010). - ISBN 978-3-941298-60-6

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Dr. Steffen Strehle
Last modified: Sep 14, 2016