Published Journals 121 bis 130 von 252 EinträgenHufenbach, W.; Adam, F.; Fischer, W.-J.; Kunadt, A.; Weck, D.: Mechanical behavior of textile-reinforced thermoplastics with integrated sensor network components. In: Material and Design 32 (2011), Nr. 10, S. 4931–4935He, J.; Richter, K.; Bartha, J.W.; Howitz, S.: Fabrication of silicon template with smooth tapered sidewall for nanoimprint lithography. In: J. Vac. Sci. Technol., Seiten 06FC16-1 bis 06FC16-5 B 29(6) (2011)Bott, S.; Rzehak, R.; Vasilev, B.; Kücher, P.; Bartha, J.W.: A CMP Model Including Global Distribution of Pressure. In: IEEE Transactions on Semiconductor Manufacturing 24 (2011), Nr. 2, S. 304–314Vasilev, B.; Rzehak, R.; Bott, S.; Kücher, P.; Bartha, J.W.: Greenwood-Williamson Model Combining Pattern-Density and Pattern-Size Effects in CMP. In: IEEE Transactions on Semiconductor Manufacturing 24 (2011), Nr. 2, S. 338–347Berndt, D.; Heber, J.; Sinning, S.; Rudloff, D.; Wolschke, S.; Eckert, M.; Schmidt, J.U.; Bring, M.; Wagner, M.; Lakner, H.: Calibration of diffractive micromirror arrays for microscopy applications. In: Proceedings of SPIE 8191 (2011), S. 819110O–1–819110O–9Parshina, L.S.; Novodvorsky, O.A.; Panchenko, V.Ya.; Khramova, O.D.; Cherebilo, Ye.A.; Lotin, A.A.; Wenzel, C.; Trumpaicka, N.; Bartha, J.W.: Photoluminescent properties of nitrogen and phosphorus doped ZnO thin films fabricated by pulsed laser deposition method. In: Laser Physics issue 4 21 (2011), Nr. 4, S. 790–795Kirchner, R.; Adolphi, B.; Landgraf, R.; Fischer, W.-J.: Antisticking Layers on Antireflective Chromium for Hybrid (CNP) Nanoimprint Molds. In: Proc. SPIE 7545 (2011), S. 7545Kirchner, R.; Teng, L.; Lu, B.; Adolphi, B.; Fischer, W.-J. : Degradation of Perfluorotrichlorosilane Antisticking Layers: The Impact on Mold Cleaning, UVNanoimprinting, and Bonded UV-Nanoimprint Molds. In: Jpn. J. Appl. Physics 50 (2011), S. 6–13Kirchner, R.; Finn, A.; Teng, L.; Plötner, M.; Jahn, A.; Nueske, L.; Fischer, W.-J.: UV-Nanoimprinting Using Non-Transparent Molds and Non-Transparent Substrates. In: Microelectronic Engineering, 88(8):20042008, August 2011 (2011), S. 1–5Finn, A.; Schossig, M.; Norkus, V.; Gerlach, G.: Microstructured Surfaces on LiTaO3-Based Pyroelectric Infrared Detectors. In: IEEE Sensors Journal, 11(10):22042211, October 2011 (2011)Zurück 9 10 11 12 13 14 15 16 17 18 WeiterDiese Informationen werden vom Vorgängersystem FIS bereitgestellt. Archive: 2015 | 2014 | 2013 | 2012 | 2011 | 2010 | 2009 | 2008 | 2007 | 2006 | 2005 | 2004