Konferenzen

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Teng, L.; Kirchner, R.; Plötner, M.; He, J.; Jahn, A.; Hagemann, F.; Fischer, W.-J.: Fabrication and Characterization of Sub-500 nm Channel Organic Field Effect Transistor Using UV Nanoimprint Lithography With Opaque Molds. In: Proc. 37th Int. Conf. on Micro and Nano Engineering 2011 Abstracts 24 Seiten (2011)

Geidel, M.; Knaut, M.; Albert, M.; Bartha, J.W.: In situ XPS Investigation of the Chemical Surface Composition during the ALD of ultra-thin Aluminum Oxide Films. In: IEEE 2011 Semiconductor Conference Dresden, September 27 to 28, 2011, Dresden (2011)

Albert, M.; Strobel, C.; Leszczynska, B.; Zimmermann, T.; Kuske, J.; Bartha, J.W.: Dynamic VHF-PECVD Deposition with Linear Plasma Sources for Amorphous and Microcrystalline Silicon Solar Cells. In: Society of Vacuum Coaters(SVC), Technical Conference Proceedings, Chicago 2011 (2011)

Kirchner, R.; Teng, L.; Finn, A.; Fischer, W.-J.: UV-assisted Nanoimprinting using Opaque Molds and Substrates. In: Proc. BIT’s 1st Annual Low Carbon Earth Summit 2001, Sub-conference 3: 1st Annual World Congress of Nano-Science & Technology (NANO-S&T 2011) 2 (2011), S. 715

Finn, A.; Jahn, A.; Kirchner, R.; Künzelmann, U.; He, J.; Wägner, M.; Fischer, W.-J.: Multilayer Nano-Imprint-Lithography Mold Fabrication Process. In: Proc. 3. GMM-Workshop Mikro-Nano-Integration, 2.-4.3.2011, Stuttgart, VDE Verlag GmbH GMM Fachbericht 68 (2011), S. 8–12

Landgraf, R.; Finn, A.; Kirchner, R.; Haugwitz, T.; Arndt, S.; Deicke, F.; Fischer, W.-J.: Biosensor System with Polymer Microring Resonators Manufactured by Multilevel-UV-Nanoimprint. In: Proc. Mikro-System-Technik Kongress 2011 (2011)

Haugwitz, T.; Landgraf, R.; Kirchner, R.; Finn, A.; Fischer, W.-J.: Planar Optical Waveguide Design for UV-Nanoimprinted Microring Resonator Based Biosensors. In: Proc. IEEE Sensors 2011 (2011)

Kirchner, R.; Nueske, L.; Finn, A.; Lu, B.; Fischer, W.-J.: Stamp-and-Repeat UVImprinting of Spin-Coated Films: Pre-Exposure and Imprint Defects. In: Proc. 37th Int. Conf. on Micro and Nano Engineering 2011 (MNE2011), (2011)

Finn, F.; Hagemann, F.; Hensel, R.; Kirchner, R.; Jahn, A.; Fischer, W.-J.: Characterisation of the Geometrical Properties of Multilayer Nano-Imprint-Lithography Molds for Optical Applications. In: Proc. 37th Int. Conf. on Microand Nano Engineering 2011 (MNE2011) (2011)

Benner, F.; Tarasova, M.; Moll, P.; Jakschik, S.; Dirnstorfer, I.; Knaut, M.; Mikolajick, T.: RF-Magnetron Sputtered Dielectric Backside Passivation. In: Proceedings of the 26th European Photovoltaic Solar Energy Conference, Hamburg (2011)

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Philipp Wenskus
Letzte Änderung: 07.02.2018