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Estel, K.; Künzelmann, U.; Bartha, J.W.; Mayer, E.-P.; Barthel, H.: Influence of Ionic Strength and pH-Value on the Silicon Dioxide Polishing Behaviour of Slurries based on Pure Silica Suspensions. In: Advanced Interconnects and Chemical Mechanical Planarization for Micro- and Nanoelectronics, MRS Spring Meeting 2010, San Francisco, CA, 5. - 7. April 2010 Materials Research Society - Symposium Proceedings, 1249 (2010), S. 97–102

Künzelmann, U.; Schumacher, H.; Bartha, J.W.: In situ-ATR-FTIR-Untersuchungen zur Wirkungsweise von Additiven in TSV-Cu-Elektrolyten. In: Industriepartnersymposium, Dresden, 30. Sept. 2010 Poster (2010)

Estel, K.; Künzelmann, U. ; Bartha, J.W.; Mayer, E.-P.; Barthel, H.: Influence of Ionic Strengths and pH-Values of Model-Slurries for Chemical Mechanical Silicon Dioxide Polishing with different Nanodispersed Pure Silica Suspensions. In: Nanofair 2010, Dresden, 6.-7. Juli 2010 Poster (2010)

Geidel, M.; Knaut, M.; Albert, M.; Bartha, J.W.: In-situ XPS study on the growth of ultra-thin Al-O and Ti-O based films with atomic layer deposition. In: E-MRS 2010 Spring Meeting in Strasbourg, 07.06.2010-11.06.2010 Poster (2010)

Strobel, C.; Leszczynska, B. ; Zimmermann, T.; Albert, M.; Bartha, J.W.; Kuske, J.: Dynamic VHF-PECVD concept tool with linear plasma sources for silicon based thin film solar cells. In: Proceedings of the 25th European Photovoltaic Solar Energy Conference, Valencia, 2010 (2010)

Kirchner, R.; Landgraf, R.; Bertram, M.; Fischer, W.-J.: Direct UV-nanoimprint of polymer microring resonators as optical transducers. In: Proc. 2nd Workshop on Micro-Nano-Integration, 03.-04.03.2010, Erfurt Paper 35 (2010)

Kirchner, R.; Adolphi, B.; Landgraf, R.; Fischer, W.-J.: Antisticking Layers on Antireflective Chromium for Hybrid (CNP) Nanoimprint Molds. In: EMLC2010 - 26th European Mask and Lithography Conference (18.01.-20.01.2010) (2010), S. 70–73

Kunadt, A.: Technologische und messtechnische Untersuchungen zu integrierten Sensornetzwerken. In: Mitarbeitertagung SFB 639, Rabenau, 27.11.2009 (2009)

Suchaneck, G.; Volkonskiy, O.; Hubicka, Z.; Dejneka, A. ; Jastrabik, L.; Adolphi, B.; Bertram, M.; Gerlach, G.: Preparation of PZT thin films on copper-coated kapton foils with titania seeding layer. In: International conference "Functional materials and nanotechnologies" FM&NT-2009, Riga, March 31 - April 3, 2009; Integrated Ferroelectrics 108 (2009), S. 1–10

Türke, A.; Pich, A.; Adler, H.-J.; Fischer, W.-J.: Microwave-Assisted Synthesis and Characterisation of Silver Hybrid Particles. In: APME 2009, Dresden (2009)

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Philipp Wenskus
Letzte Änderung: 07.02.2018