Conferences 301 bis 310 von 428 EinträgenHoßbach, C.; Schönberger, A.; Teichert, S.; Wilde, L.; Gluch, J.; Menzel, S.; Hintze, B.; Albert, M.; Bartha, J.W.: Metalorganic Atomic Layer Deposition of low-resistive and highly conformal Ta-N-C thin films. In: AVS ALD 2008, 01.7.2008, Brügge, Belgien (2008)Hoßbach, C.; Menzel, S.; Thomas, J.; Teichert, S.; Hintze, B.; Wilde, L.; Schmidt, D.; Albert, M.; Bartha, J.W.: Plasma-Enhanced Atomic Layer Deposition of High Quality Tantalum Carbonitride Thin Films. In: MAM-Conference 2008, 3.3.2008, Dresden (2008)Scholles, M.; Frommhagen, K.; Gerwig, C.; Knobbe, J.; Lakner, H.; Schlebusch, D.; Schwarzenberg, M.; Vogel, U.: Recent advancements in system design for miniaturized MEMS-based laser projectors . In: Proc. SPIE 6911 (2008), S. 69110U–1–69110U–12Schmidt, J.-U.; Friedrichs, M.; Bakke, T.; Voelker, B.; Rudloff, D.; Lakner, H.: Technology development for micromirror arrays with high optical fill factor and stable analogue deflection integrated on CMOS substrates . In: Proc. SPIE 6993 (2008), S. 69930D–01–69930D–08Schaulin, M.; Knobbe, J.; Neumann, H.; Seidl, K.; Kleinmann, L.; Schelinski, U.; Scholles, M.; Schönherr, H.-J.; Lakner, H.: MEMS-based optoelectronic system for distance measurement applicable for panorama cameras . In: Proc. SPIE 6887 (2008), S. 68870A–1–68870A–11Grüger, H.; Knobbe, J.; Scholles, M.; Schenk, H.; Lakner, H.: New Approach for MEMS Scanning Mirror for Laser Projection Systems . In: Proc. SPIE 6887 (2008), S. 68870L–1–68870L–6Gil, T.; Franke, S.; May, C.; Amelung, J.; Lakner, H.; Leo, K.: High efficient pin orange organic light emitting diode fabrication with novel Al cathode using DC magnetron sputtering. In: Proc. SPIE 6999 (2008), S. 69110U–1–69110U–12Scholles, M.; Frommhagen, K.; Gerwig, C.; Grüger, H.; Knobbe, J.; Lakner, H.; Schlebusch, D.; Schwarzenberg, M.; Vogel, U.: Improved methods of system integration for MEMS-based laser projection systems . In: Smart System Integration 2008: 2nd European Conference and Exhibition on Integration Issues of Miniaturized Systems (2008), S. 137–144Schenk, H.; Wagner, M.; Gehner, A.; Müller, M.; Sandner, T.; Drabe, C.; Lakner, H.: Silicon based micro-optic modulators. In: MME 2008, 19th Micro Mechanics Europe Workshop, Technical Digest, als CD (2008)Jung, D.; Klose, T.; Grashoff, T.; Sandner, T.; Schenk, H.; Lakner, H.: 3D Hybrid Capacitance Model for Angular Vertical Comb Drives . In: ESTC 2008, 2nd Electronics System-Integration Technology Conference (2008)Zurück 27 28 29 30 31 32 33 34 35 36 WeiterDiese Informationen werden vom Vorgängersystem FIS bereitgestellt. Conference Archive: 2015 | 2014 | 2013 | 2012 | 2011 | 2010 | 2009 | 2008 | 2007 | 2006 | 2005 | 2004