Konferenzen 111 bis 120 von 428 EinträgenFinn, A.; Hensel, R.; Jahn, A.; Killge, S.; Werner, C.: Polymer Structures with Undercuts by Reverse Imprint Lithography : Vortrag + Poster (Best Poster Award). In: Proc. 38th Int. Conf. on Micro and Nano Engineering 2012 (MNE 2012) (2012)Finn, A.; Lu, B.; Kirchner, R.; Richter, K.; Fischer, W.-J.: Cleaning Defects of Soft UV-Nanoimprint Molds for High Aspect-Ratio Features : Poster. In: 56th Int. Conf. on Electron, Ion and Photon Beams (EIPBN 2012) (2012)Waegner, M.; Suchaneck, G.; Gerlach, G.; Eng, L.M.; Finn, A.: Nano-patterned PZT films for perspective functional materials. In: International Symp Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (ISAF/ECAPD/PFM), 2012 (2012)Päßler, S.; Fischer, W.-J.: Evaluation of Algorithms for Chew Event Detection. In: Proc of BodyNets’12, September 24–26, 2012 (2012)Päßler, S.; Fischer, W.-J.: Food Intake Activity Detection Using an Artificial Neural Network. In: Proceedings of BMT 2012: 46. DGBMT Jahrestagung, September 16th-18th, 2012, Jena, Germany, Proceedings of BMT 2012 Biomed Tech 2012; 57 (Suppl. 1) (2012)Langa, S.; Utsumi, J.; Ludewig, T.; Drabe, C.: Room temperature bonding for vacuum applications: climatic and long time tests . In: Microsyst. Technol. (2012)Leszczynska, B.; Strobel, C.; Albert, M.; Bartha, J.W.; Kuske, J.: High Rate PECVD Deposition of Silicon Thin Films at Very High Excitation Frequencies (81.36-140 MHz). In: Proceedings of 27th European Photovoltaic Solar Energy Conference and Exhibition 2012 (2012), S. 2507–2510Junige, M.; Albert, M.; Bartha, J.W.: Opportunities and challenges of ellipsometry for process monitoring in atomic layer deposition. In: 7th Workshop Ellipsometry : March 05-07, 2012 Leipzig, Germany. Leipzig, 2012 Vortrag und Poster (2012)Junige, M.; Geidel, M.; Knaut, M.; Albert, M.; Bartha, J.W.: Basic investigations of ruthenium’s ALD growth initiation. In: AVS 12th International Conference on Atomic Layer Deposition : June 17 – 20, 2012, Dresden, Germany. Dresden, 2012 Poster (2012)Junige, M.; Geidel, M.; Knaut, M.; Albert, M.; Bartha, J.W.: Atomic layer deposition monitored and characterized by joint in situ real-time spectroscopic ellipsometry and direct surface analysis. In: AVS 59th Annual International Symposium and Exhibition : October 28 – November 02, 2012, Tampa, Florida, USA. Tampa, Florida, 2012 Vortrag (2012)Zurück 8 9 10 11 12 13 14 15 16 17 WeiterDiese Informationen werden vom Vorgängersystem FIS bereitgestellt.