Konferenzen

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Knaut, M.; Albert, M.; Bartha, J.W.: In-situ analytics for development and control of atomic layer deposition processes. In: 11th European Advanced Equipment Control/Advanced Process Control (AEC/APC) Conference (2011)

Knaut, M.; Albert, M.; Bartha, J.W.: QCM sensors for advanced process development and control. In: Proceedings of 11th AVS ALD Conference, Cambridge, Massachusetts, USA (2011)

Hoffmann, M.; Todt, U.; Hesse, J.; Philipp, A.; Törker, M.; May, C.; Leo, K.: Realization of 33x33 cm² large area OLED panels. In: Plastic Electronics 11.-13.10.2011 (2011)

Henke, T.; Geidel, M.; Knaut, M.; Albert, M.; Bartha, J.W.: Flash Light Induced Atomic Layer Deposition. In: Subtherm 2011 – International Topical Workshop on Subsecond Thermal Processing of Advanced Materials, October 25 – 27, 2011, Dresden (2011)

Henke, T.; Geidel, M.; Knaut, M.; Albert, M.; Bartha, J.W.: Flash-ALD - A Novel Approach for Atomic Layer Controlled Growth of Thin Films Induced by Flash Heating. In: Proceedings of AVS 11th International Conference on Atomic Layer Deposition, June 26 – 29, 2011, Cambridge, Massachusetts, USA (2011)

Wojcik, H.; Lehninger, D.; Neumann, V.; Bartha, J.W.: Characterization of barrier and seed layer integrity for copper interconnects. In: Semiconductor Conference Dresden (SCD), 27-28 Sept. 2011 (2011)

Neumann, V.; Hiess, A.; Jahn, A.; Merkel, U.; Richter, K.; Viehweger, K.; Wenzel, C.; Bartha, J.W.: A Through Silicon Via concept for sensor applications. In: Semiconductor Conference Dresden (SCD), 27-28 Sept. 2011 (2011)

Leszczynska, B.; Strobel, C.; Albert, M.; Bartha, J.W.; Stephan, U.; Kuske, J.: Influence of excitation frequencies (81.36 – 120 MHz) in the VHF – PECVD technique on the deposition rate and properties of silicon thin-film solar cells. In: Proc. of the 26th European Photovoltaic Solar Energy Conference, Hamburg 2011 (2011)

Leszczynska, B.; Strobel, C.; Albert, M.; Zimmermann, T.; Kuske, J.; Bartha, J.W.: Dynamic VHF-PECVD technique for flexible substrate coating. In: Proc. of the 54th Annual SVC Technical Conference, Chicago 2011 (2011)

Päßler, S.; Wolff, M.; Fischer, W.-J.: Chewing Sound Classification Using Algorithms of Speech Recognition. In: BMT 2011: 45. DGBMT Jahrestagung September 27th - 30th (2011)

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Philipp Wenskus
Letzte Änderung: 07.02.2018