Conferences 401 bis 410 von 428 EinträgenScholles, M.; Braeuer, A.; Frommhagen, K.; Gerwig, C.; Lakner, H. K.; Schenk, H.; Schreiber, P.; Schwarzenberg, M.: Design of miniaturized optoelectronic systems using resonant microscanning mirrors for projection of full-color images. In: Proceedings of SPIE 6288 (2006), S. 628807–1–628807–12Wagner, M.; Künzelmann, U.; Schenk, H.; Lakner, H.: Global flatness of spatial light modulators. In: Proceedings of SPIE 6114 (2006), S. 611404–1–611404–12Dürr, P.; Gehner, A.; Schmidt, J.; Kunze, D.; Wagner, M.; Lakner, H.: Microactuator with extended analog deflection at low drive voltage. In: Proceedings of SPIE 6114 (2006), S. 61140I–1–61140I–10Drabe, C.; Klose, T.; Schenk, H.; Wolter, A.; Lakner, H.: A large deflection translatory actuator for optical path length modulation. In: Proc. of SPIE 6181 (2006), S. 618104–1–618104–8Bakke, T.; Völker, B.; Rudloff, D.; Friedrichs, M.; Schenk, H.; Lakner, H.: Large scale, drift free monocrystalline silicon micromirror arrays made by wafer bonding. In: Proceedings of SPIE 6114 (2006), S. 611402–1–611402–7Yoo, J.-H.; Marschner, U.; Flatau, A.B.: Preliminary Galfenol Vibratory Gyro-Sensor Design. In: SPIE 12th International Symposium on Smart Structures and Materials, Conference 5764 Smart Structures and Integrated Systems, 6-10 March 2005, San Diego, USA (2005)Albert, M.; Terasa, R.; Kuske, J.: VHF Linear Plasma Source for Large Area Deposition of Amorphous and Multicrystalline Silicon Solar Cells. In: 20th European Photovoltaic Solar Energy Conference and Exhibition, Barcelona, 6.-10.06.2005 (2005)Bakke, T.; Friedrichs, M.; Völker, B.; Reiche, M.; Leonardsson, L.; Schenk, H.; Lakner, H.: Spatial light modulators with monocrystalline silicon micromirrors made by wafer bonding. In: Proceedings of SPIE vol. 5715 (2005), S. 69–79Klose, T.; Kunze, D.; Sandner, T.; Schenk, H.; Lakner, H.; Schneider, A.; Schneider, P.: Stress optimization of a micromechanical torsional spring. In: Technical Proceedings of the 2005 Nanotechnology Conference and Trade Show vol. 3 (2005), S. 602–605Hübner, R.; Hecker, M.; Mattern, N.; Hoffmann, V.; Wetzig, K.; Heuer, H.; Wenzel, C.; Engelmann, H.j.; Zschech, E.: Degradation mechanism of thin Ta-Si-N diffusion barriers for Cu interconnects. In: Proceedings ICMAT 2005, 3.-8. Juli , Singapore (2005)Zurück 34 35 36 37 38 39 40 41 42 43 WeiterDiese Informationen werden vom Vorgängersystem FIS bereitgestellt. Conference Archive: 2015 | 2014 | 2013 | 2012 | 2011 | 2010 | 2009 | 2008 | 2007 | 2006 | 2005 | 2004