Publications 2012

21 bis 30 von 82 Einträgen

Kubasch, C.: Detection of Water in Low-k Dielectric Film. In: EUFANET, Smart Failure Analysis for New Materials in Electronic Devices, 17.-18. September 2012, Dresden Vortrag (2012)

Geidel, M.; Junige, M.; Albert, M.; Bartha, J.W.: In-situ analysis on the initial growth of ultra-thin ruthenium films with atomic layer deposition. In: Microelectronic Engineering (2012)

Päßler, S.; Kraljevski, I.; Fischer, W.-J.: Adaptation of Models for Food Intake Sound Recognition Using Maximum a Posteriori Estimation Algorithm. In: Proc. of BSN 2012: The Ninth International Conference on Wearable and Implantable Body Sensor Networks May 09th-12th (2012), S. 148–153

Landgraf, R.; Kirchner, R.; Haugwitz, T.; Finn, A.; Deicke, F.; Fischer, W.-J.: Polymeroptische Mikroringresonatoren für biosensorische Anwendungen: Design und Integration. In: Proc. Microsys, 20.3.-21.03.2012, Berlin (2012)

Landgraf, R.; Kirchner, R.; Finn, A.; Arndt, S.; Haugwitz, T.; Deicke, F.; Fischer, W.-J.: Polymer Microring Resonator Directly Patterned by Multilevel-Nanoimprint: Integration into a Biosensor System with a Miniaturized Microfluidic System. In: 16. GMA/ITG-Fachtagung Sensoren und Messsysteme, Nürnberg 2012 (2012), S. 259–267

Finn, A.; Hensel, R.; Jahn, A.; Killge, S.; Werner, C.: Polymer Structures with Undercuts by Reverse Imprint Lithography : Vortrag + Poster (Best Poster Award). In: Proc. 38th Int. Conf. on Micro and Nano Engineering 2012 (MNE 2012) (2012)

Finn, A.; Lu, B.; Kirchner, R.; Richter, K.; Fischer, W.-J.: Cleaning Defects of Soft UV-Nanoimprint Molds for High Aspect-Ratio Features : Poster. In: 56th Int. Conf. on Electron, Ion and Photon Beams (EIPBN 2012) (2012)

Waegner, M.; Suchaneck, G.; Gerlach, G.; Eng, L.M.; Finn, A.: Nano-patterned PZT films for perspective functional materials. In: International Symp Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (ISAF/ECAPD/PFM), 2012 (2012)

T., Schuster; R., Landgraf; A., Finn; M., Mertig: Bio and Nano Packaging Techniques for Electron Devices : Springer-Verlag Berlin Heidelberg, 2012, 557-579 (2012). - ISBN 978-3-642-28521-9

J., Uhlemann; R., Kirchner; K.-J., Wolter; G., Gerlach: Bio and Nano Packaging Techniques for Electron Devices : Springer-Verlag Berlin Heidelberg, 2012, 491-514 (2012). - ISBN 978-3-642-28521-9

Diese Informationen werden vom Vorgängersystem FIS bereitgestellt.

About this page

Dr. Steffen Strehle
Last modified: Sep 14, 2016