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441 bis 450 von 709 Einträgen

Richter, K.; Viehweger, K.; He, J.; Bartha, J.W.: Creation of Vias With optimized Profile for 3-D Through Silicon Interconnects (TSV). In: Plasma Process. Polym. 6 (2009), S. 193–197

Keil, K.; Hauptmann, M.; Kretz, J.; Constancias, C.; Pain, L.; Bartha, J.W.: Resolution and total blur: Correlation and focus dependencies in e-beam lithography. In: J. Vac. Sci. Technol. B27 (2009), Nr. 6, S. 2722–2725

Rose, M.; Niinistö, J.; Michalowski, P.; Gerlich, L.; Wilde, L.; Endler, I.; Bartha, J.W.: Atomic Layer Deposition of Titanium Dioxide Thin Films from Cp*Ti(OMe)3. In: J. Phys. Chem. C 2009 113 (2009), S. 21825–21830

Schenk, H.; Sandner, T.; Drabe, C.; Scholles, M.; Frommhagen, K.; Gerwig, C.; Lakner, H.: Ultra compact laser based projectors and imagers. In: Human-Computer Interaction, Part III LNCS vol. 5612 (2009), Nr. XXII, S. 501–510

Strehle, S.; Wetzig, K.; Bartha, J.W.: Electrical properties of electroplated Cu(Ag) thin films. In: Thin Solid Films 517 (2009), S. 3320–3325

Rieske, R.; Landgraf, R.; Wolter, K.-J.: Novel Method for Crystal Defect Analysis of Laser Drilled TSVs. In: Proc. of the 59th Electronic Components and Technology Conference 2009, San Diego, USA, 26.-29.05.2009 (2009), S. 1139–1146

Landgraf, R.; Fischer, W.-J.; Günther, A.; Tham, N.; Arndt, S.: Mikrofluidisches System für sensorische Anwendungen : Poster. In: Mikrosystemtechnik-Kongress, Berlin, 12.-14.10.2009 (2009)

Landgraf, R.; Kirchner, R.; Fischer, W.-J.: Photonic Biosensors based on Microring Resonators – High Integration and Low-Cost Sensing : Abstract. In: Korean-German-Symposium on Medical Diagnostics, Dresden, Fraunhofer IZfP-D, 29.10.2009 (2009)

Landgraf, R.; Kaiser, M.-K.; Posseckardt, J.; Adolphi, B.; Fischer, W.-J.: Functionalization of Polymer Sensor Surfaces by Oxygen Plasma Treatment. In: Proc. Chemistry, Eurosensors XXIII Conference 2009, Lausanne, CH, 6.-9.09.2009 1 (2009), Nr. 1, S. 1015–1018

Landgraf, R.; Fischer, W.-J.: Fabrication and Functionalization of Polymer Microring Resonators for Photonic Biosensing : Abstract. In: 6. Deutsches BioSensor Symposium, Freiburg (2009), S. 105

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Martin Knaut
Last modified: May 29, 2019