Publications 2007 https://tu-dresden.de/ing/elektrotechnik/ihm/hlt/forschung/publikationen-1/hlt_2007 https://tu-dresden.de/logo.png Publications 2007 11 bis 17 von 17 EinträgenS., Nawka; E., Erben; B., Adolphi; J.W., Bartha: Characterization of the initial growth of hafnium silicate films in dependence of process parameters and substrate materials. In: Proc. EMRS Fall-Meet., Warschau (PL) (2007)S., Menzel; D., Reitz; U., Künzelmann; M., Albert; J.W., Bartha: Fabrication of Surface Acoustic Wave Structures with buried Copper IDTs using the Copper Damascene Process. In: Tag.-Bd. Int. Conf. Planarization/CMP Technology (ICPT) (2007), S. 479–485S., Menzel; C., Hossbach; J., Thomas; M., Albert; T., Gemming; M., Stangl; S., Hampel: ALD of Ta-based Adhesion Layers for CNT-Cu Matrix Composite Film Growth. In: Proc. MSR Spring Meet., San Francisco (US) (2007)K., Richter; C., Kubasch; J.W., Bartha: Micro-patterned silicon surfaces for biomedical devices. In: Plasma Process. Polym. 4 (2007), S. 411–415D., Reitz; J., Thomas; H., Schmidt; S., Menzel; K., Wetzig; M., Albert; J.W., Bartha: Dama¬scene technique applied to surface acoustic wave devices. In: J. Va. Sci. Technol. 25 (2007), S. 271–276S., Menzel; D., Schmidt: Oberflächenwellen-Strukturen in Cu-Damaszentechnologie. In: Vakuum in der Forschung und Praxis 19 (2007), S. 4Hellriegel, R.; Albert, M.; Hintze, B.; Winzig, H.; Bartha, J.W.: Remote plasma etching of titanium nitride using NF3/argon and chlorine mixtures for chamber clean applications. In: Microelectronic Engineering 84 (2007), S. 37–41Zurück 1 2 Diese Informationen werden vom Vorgängersystem FIS bereitgestellt.