The Solid-State Electronics Laboratory (Institut für Festkörperelektronik - IFE) is one of 12 laboratories of the Electrical and Computer Engineering Department at Dresden University of Technology. Together with the Semiconductor Technology and Microsystems Lab and several chairs of the Circuits and Systems and the Packaging Labs, the Solid-State Electronics Lab is responsible for the microelectronics specialization in the Electrical Engineering program. Research and teaching fields of the Institute for Solid-State Electronics are dedicated to the interaction of physics, electronics and (microelectronics) technology in:

• materials research, technology, and solid state sensor operational principles,
• application of sensors for special measurement problems,
• design of sensors and sensor systems including the simulation of components as well as of complex systems,
• development of thin films and multilayer stacks for sensor application.

CHAIR FOR SOLID-STATE ELECTRONICS PROF. DR.-ING. HABIL. G. GERLACH						CHAIR FOR PLASMA TECHNOLOGY FOR DEPOSITION PROCESSES PROF. DR. RER. NAT. E. SCHULTHEIß
THERMAL SENSORS		PIEZORESISTIVE SENSORS		MODELING AND SIMULATION		OXIDE FILMS FOR SENSORS		FILMS ON POLYMER SUBSTRATESt
Materials Technology Sensor design Metrology		Materials Technology Sensor design Metrology Components and system models NWM, FNM, FEM Coupled simula-tion techniques		Components and system models NWM, FNM, FEM Coupled simula-tion techniques		Materials Technology Design of sensors Performance indicators		Materials Technology Process development
Applications - Radiation Pyrometry - Thermal imaging - Gas analysis - Thermal micro-   scopy		Applications Measurement of: - Humidity, Pressure - Gas concentration - pH-value - Solvent   concentration		Applications - Pyroelectric   sensors - MEMS		Applications - Sensor arrays - Gas analysis		Applications - Barrier layers - Flexible substrates   for microelectronics - Electronics on   polymer substrates
TECHNOLOGY, DESIGN, CAD						TECHNOLOGY, DEPOSITION PROCESSES