Research areas

Research in Semiconductor technologies

The research projects at the chair of semiconductor technologies basically contains the micro structuring and nano structuring of semiconductors, insulators and metals as well as corresponding analytics. The technical equipment in our cleanroom facilitates the realization of test-structures with all essential technologies like vacuum coating of metals and insulators, dry and wet etching, electrochemic coating and chemical-mechanical polishing.   
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Research in Microsystem technologies

The chair of microsystem technologies deals with the functional conjunction of individual microtechnologies towards microsystems by using various system technologies. Technically the sensor, actuator and data-handling are integrated on a chip (monolithic integration) or substrate (hybrid integration) for that. Focuses are on the design, simulation, production technology and measurement of organic semiconductor devices, intelligent sensors, gas sensors, SAW-components as well as the power supply of microsystems.
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Research in Optoelectronic components and systems

The chair of optoelectronic components and systems is dedicated especially to the foundations and production technologies of innovative products such as OLEDs, micromirror arrays and MOEMS-sanning-mirrors. The main field of attention are the procedures for the respective technological realization.
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