Photo of a woman in the lab. She sits at a table and works at the microscope. © Amac Garbe Das Foto zeigt im Vordergrund ein säulenartiges Konstrukt aus gläsernen Fragmenten, in welchen sich Teile des Raumes spiegeln. Im Hintergrund ist durch ein Fenster ein Gebäude zu sehen. © TU Dresden

Research at our institute

Research at the IHM primarily covers the three areas of semiconductors, microsystems and optoelectronic devices and systems. The following web sites provide you with more information about our research activities and projects.

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Research Areas

Semicon­ductor technolo­gies

The research projects at the chair of semiconductor technologies basically contains the micro structuring and nano structuring of semiconductor, insulators and metals as well as the corresponding analytics.
Microsystem technolo­gies

The chair of microsystem technologies deals with the functional conjunction of individual microtechnologies towards microsystems by using various system technologies.
Optoelec­tronic components and systems

The chair of optoelectronic components and systems is dedicated especially to the foundations and production technologies of innovative products such as OLEDs, micromirror arrays and MOEMS-sanning-mirrors.
Das Foto zeigt eine Frau mit weißem Laborkittel in einem Labor. In der Hand hält sie ein Glasgefäß mit einer roten Flüssigkeit, welches sie intensiv betrachtet. © Amac Garbe

Forschungsfeld­er

Research at the IHM primarily covers the three areas of semiconductors, microsystems and optoelectronic devices and systems.

Object of researches at the Institute of Semiconductors and Microsystems are the micro- and nanostructurings of semiconductors, insulators and metals as well as the associated electrical, mechanical and thermal effects. The department of microsystems focuses on the design, simulation, production technology and measurement of organic semiconductor devices, intelligent sensors, gas sensors, SAW-components as well as the power supply of microsystems. The department of optoelectronic components and systems focuses on the foundations and production technologies of innovative products like OLEDs, micromirror arrays and MOEMS-scanning-mirrors.

Research areas