Veröffentlichte Konferenzbeiträge 1 bis 10 von 171 EinträgenKnaut, M.; Albert, M.; Bartha, J.W.: In situ investigations on the crystal structure dependent ALD film growth of TiO2. In: 18th AVS conference on Atomic Layer Deposition, Incheon, South Korea (2018)Meister, T.; Ellinger, F.; Bartha, J.W.; Berroth, M.; Burghartz, J.; Claus, M.; Frey, L.; Gagliardi, A.; Grundmann, M.; Hesselbarth, J.; Klauk, H.; Leo, K.; Lugli, P.; Mannsfeld, S.; Manoli, Y.; Negra, R.; Neumaier, D.; Pfeiffer, U.; Reidl, T.; Scheinert, S.; Scherf, U.; Thiede, A.; Troester, G.; Vossiek, M.; Weigel, R.; Wenger, C.; Alavi, G.; Becherer, M.; Chavarin, C.A.; Darwish, M.; Ellinger, M.; Fan, C.Y.; Fritsch, M.; Grotjahn, F.; Gunia, M.; Haase, K.; Hilliger, P.; Ishida, K.; Jank, M.; Knobelspies, S.; Kuhl, M.; Lupina, G.; Naghadeh, S.M.; Münzenrieder, N.; Özbek, S.; Rasteh, M.; Salvatore, G.A.; Schrüfer, D.; Strobel, C.; Theisen, M.; Tückmantel, C.; von Wenckstern, H.; Wang, Z.; Zhang, Z.: Program FFlexCom – High Frequency Flexible Bendable Electronics for Wireless Communication Systems. In: IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems (COMCAS), 8244733 (2017) (2017)Strobel, C.; Leszczynska, B.; Leszczynski, S.; Albert, M.; Stahr, F.; Kuske, J.; Bartha, J.W.: , Amorphous Silicon Deposited with Plasma Excitation Frequencies Larger Than 100 MHz for Heterojunction Solar Cells. In: 33rd European Photovoltaic Solar Energy Conference and Exhibition, Amsterdam (2017) (2017), S. 745–748Strobel, C.; Chavarin, C.A.; Kitzmann, J.; Lupina, G.; Wenger, C.; Albert, M.; Bartha, J.W.: First Investigation of N-Doped Amorphous Silicon-Graphene Interfaces for Flexible High Frequency Heterojunction Transistors. In: ISFOE17 - 10th International Symposium on Flexible Organic Electronics, 3-6 July (2017), Thessaloniki, Greece (2017)Albert, M.; Junige, M.; Wenger, C.; Lukosius, M.; Chavarin, C.A.; Bartha, J.W.: Graphene monolayers for electronic applications evaluated by optical light microscopy with polarization. In: Graphene 2017 : March 28-31, 2017, Barcelona, Spain. Barcelona, 2017 Poster (2017)Junige, M.: HERALD – Early Career Investigators : In-situ real-time Spectroscopic Ellipsometry for the investigation of Atomic Layer Processing. In: Joint EuroCVD 21 – Baltic ALD 15 Conference : 11th to 14th of June 2017 in Linköping, Sweden. Linköping, 2017 Poster (2017)Junige, M.; Schulz, S.; Albert, M.; Weigang, J.J.; Bartha, J.W.; Barry, S.T.: CVD-literature overview of metal-organic and organometallic precursors as inspiration for the Atomic Layer Deposition of Gold. In: Joint EuroCVD 21 – Baltic ALD 15 Conference : 11th to 14th of June 2017 in Linköping, Sweden. Linköping, 2017 Poster (2017)Killge, S.; Bartussek, I.; Junige, M.; Neumann, V.; Wenzel, C.; Böttcher, M.; Albert, M.; Wolf, M.J.; Bartha, J.W.: 3D system integration on 300 mm wafer level : high-aspect-ratio TSVs with ruthenium seed layer by thermal ald and subsequent copper electroplating. In: Materials for Advanced Metallization : March 26-29, 2017, Dresden, Germany. Dresden, 2017 (2017)Wenger, C.; Chavarin, C.A.; Strobel, C.; Junige, M.; Kitzmann, J.; Lukosius, M.; Lupina, G.; Albert, M.; Bartha, J.W.: Towards Graphene-based heterojunction devices for microelectronic applications. In: Graphene 2017 : March 28-31, 2017, Barcelona, Spain. Barcelona, 2017 (2017)Junige, M.; Kitzmann, J.; Chavarin, C.A.; Geidel, M.; Reif, J.; Albert, M.; Lupina, G.; Wenger, C.; Bartha, J.W.: In-situ real-time and in-vacuo study of the temperature impact on the Al2O3 ALD nucleation upon pristine monolayer graphene. In: AVS 17th International Conference on Atomic Layer Deposition : July 15 – 18, 2017, Denver, Colorado, USA. Denver, 2017 (2017) 1 2 3 4 5 6 7 8 9 10 WeiterDiese Informationen werden vom Vorgängersystem FIS bereitgestellt.