Veröffentlichte Konferenzbei­träge

51 bis 60 von 171 Einträgen

Haas, W.; Bartha, J. W.; Fischer, W.-J.; Richter, A.: Chemical microsensors based on hydrogels with adjustable measurement range . In: Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 87632Z (May 17, 2013) (2013)

Benner, F.; Knaut, M.; Jordan, P. M.; Dirnstorfer, I.; Ocker, J.; Bartha, J. W.; Mikolajick, T.: Improvement of Al2O3 Passivation by Ti-Doping. In: 28th European Photovoltaic Solar Energy Conference and Exhibition 2BV.1.38 (2013), S. 1156–1161

Leszczynska, B.; Fischer, D.; Albert, M.; Bartha, J.W.; Jordan, P.M.; Simon, D.K.; Dirnstorfer, I.; Kuske, J.: In-Situ H2-Plasma Pretreatment and Amorphous Silicon Deposition for Heterojunction Solar Cells at Very High Plasma Excitation Frequency. In: Proceedings of 28th European Photovoltaic Solar Energy Conference and Exhibition, Paris, Frankreich, 30.09.-04.10.2013 (2013), S. 1340–1343

Müller, M. R.; Gumprich, A.; Schütte, F.; Kallis, K.; Künzelmann, U.; Engels, S.; Stampfer, C.; Wilck, N.; Hadam, B.; Knoch, J.: Triple-Gate Structures for Advanced Field-Effect-Transistor Devices. In: 39th International Conference on Micro and Nano Engineering (MNE 2013) London, GB, September 16-19, 2013 (2013)

Müller, M. R.; Ecik, E.; Haas, F.; Rieger, T.: Buried Triple-Gate Structures for InAs-Nanowire Field-Effect Transistor Devices. In: Materials Research Society (MRS) Fall Meeting & Exhibit 2013, Boston, Massachusetts, USA, December 1-6, 2013 (2013)

Künzelmann, U.; Müller, M. R.; Menzel, S.; Lin, C.; Dysard, J.; Bartha, J. W.; Knoch, J.: Morphological and Topological Effects during the CMP of Aluminium. In: LEVITRONIX Ultrapure User Conference 2013 and 29th European CMP Users Meeting Spring 2013, Zurich/Switzerland, April 11-12, 2013 (2013)

Leszczynski, S.; Leszczynska, B.; Albert, M.; Bartha, J.W.; Stephan, U.; Kuske, J.: Influence of the Excitation Frequency Increase up to 140 MHz on the VHF-PECVD Technology. In: Proceedings of the COMSOL Conference, 23-25 October 2013, Rotterdam (2013)

Leszczynska, B.; Strobel, C.; Leszczynski, S.; Albert, M.; Bartha, J.W.; Stephan, U.; Kuske, J.: Adaptation of PECVD System for Very High Excitation Frequencies over 81.36 MHz. In: Proceedings of 28th European Photovoltaic Solar Energy Conference and Exhibition, Paris, Frankreich, 30.09.-04.10.2013 (2013), S. 2568–2572

Schmidt, D.; Junige, M.; Bartha, J.W.; Schubert, E.; Schubert, M.: Fabrication and optical modeling of nanohybrid functional slanted columnar thin films. In: 6th International Conference on Spectroscopic Ellipsometry (ICSE-VI) : May 26-31, 2013 in Kyoto, Japan, 2013 Vortrag (2013)

Junige, M.; Schmidt, D.; Barry, Seán T.; Bartha, J.W.; Schubert, M.: Evaluation of a metal-organic precursor with regard to a gold ALD process by utilizing in-situ spectroscopic ellipsometry. In: AVS 13th International Conference on Atomic Layer Deposition : July 28 – 31, 2013, San Diego, California, USA. San Diego, 2013 Vortrag (2013)

Diese Informationen werden vom Vorgängersystem FIS bereitgestellt.

Zu dieser Seite

Philipp Wenskus
Letzte Änderung: 05.10.2022