Veröffentlichte Konferen­zbeiträge

141 bis 150 von 171 Einträgen

Rößler, T.; Gluch, J.; Knaut, M.; Albert, M.; Schröder, U.; Teichert, S.; Bartha, J.W.: Characterization of ALD Hf-Y-O. In: ALD conference, 2008, Brügge (2008)

Richter, K.; Viehweger, K.; He, J.; Bartha, J.W.: Creation of Vias with Optimized Profile for 3-D Through Silicon Interconnects (TSV). In: Posterbeitrag, 11th Int. Conf. on PSE 2008, 15.-19.9.2008, Garmisch-Partenkirchen Proceedings PSE 2008 (2008)

Albert, M.; Strobel, C.; Kuske, J.; Bartha, J.W.: High rate deposition of amorphous silicon thin film solar cells (120nm/min) with a VHF-PECVD inline deposition system. In: 23rd European Photovoltaic Solar Energy Conference, 1.-5. Sept. 2008, Valencia, Spain (2008)

Albert, M.; Strehle, S.; Schmidt, D.; Knaut, M.; Hossbach, C.; Rößler, T.; Bartha, J.W.; Gluch, J.; Menzel, S.; Schröder, U.; Hintze, B.: Metal and Insulator layers for DRAM applications. In: GerALD2008, Sept. 22-23, Halle (2008)

Schmidt, D.; Knaut, M.; Albert, M.; Hintze, B.; Bartha, J.W.: TAPEDIS - a liquid halide ALD Precursor for depositing Ta-N bases thin films. In: Agent. Proc. AVS Conf. Bruges (B) avail, online (2008)

Schmidt, D.; Hossbach, C.; Menzel, S.; Thomas, J.; Teichert, S.; Hintze, B.; Wilde, L.; Albert, M.; Bartha, J.W.: Atomic Layer Deposition of Tantalum Nitride Based Thin Films. In: Agent. Proc. MAM Conf., Dresden (D) avail, online (2008)

Hossbach, C.; Schmidt, D.; Albert, M.; Adolphi, B.; Bartha, J.W.: Remote Plasma Enhanced Atomic Layer Deposition of Tantalum Nitride using TBTDET and Atomic Hydrogen. In: Baltic ALD Conference, Oslo, Norwegen (2007)

Strobel, C.; Zimmermann, T.; Albert, M.; Bartha, J.W.; Beyer, W.; Kuske, J.: Investigation on layer properties of amorphous and microcrystalline silicone deposited with moving substrates in combination with a VHF Linear Plasma Source designed for the fabrication of large area devices. In: 22rd European Photovoltaic Solar Energy Conference, 3.-7. Sept. 2007, Mailand, Italy (2007)

Wojcik, H.; Friedemann, M.; Feustelt, F.; Albert, M.; Ohsiekt, S.; Metzgert, J.; Voss, J.; Bartha, J.W.; Wenzel, C.: A Comparative study of thermal and plasma enhanced ALD Ta-N-C films on SiO(sub 2), SiCOH and Cu substrates. In: 10th International Interconnect Technology Conference, Burlingame, CA, 3-6 June 2007 IEEE 2007/ISBN 1-4244-1069-X (2007), S. 17–19

Novodvorsky, O.A.; Panchenko, V.Ya.; Sokolov, V.I.; Kharmova, O.D.; Gorbatenko, L.S.; Cherebilo, Ye.A.; Wenzel, C.; Bartha, J.W.; Hiemann, H.; Bublik, V.T.; Chtcherbatchev, K.D.: Structural characteristics and photoluminescence spectra of ZnO films produced by pulsed laser deposition. In: ICONO/LAT-2007, Minsk (BY) ohne Abdruck (2007)

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Philipp Wenskus
Last modified: Oct 05, 2022