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Bartha, J.W.; Borst, C. L.; DeNardis, D.; Papa Rao , S. S.; Kim, H.; Naeemi, A.; Nelson, A.; Wook Ro, H.; Toma, D.: Advanced Interconnects and Chemical Mechanical Planarization for Micro- and Nanoelectronics : Materials Research Sciety, Symposium Proceedings Volume 1249 (2010). - ISBN 978-1-60511-226-8

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Philipp Wenskus

Last modified: Sep 11, 2016