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Publications 2006

1 bis 5 von 5 Einträgen

Schmidt, D.; Hossbach, C.; Albert, M.; Bartha, J.W.; Menzel, S.: In-Situ Metrology for improved Atomic Layer Deposited TaN Properties by Supplying Additional Energy. In: Agent. Proc. AVS ALD Conf., San Francisco (US) avail, online (2006)

Novodvorski, O.A.; Panchenko, V.Ya.; Chramova, O.D.; Gorbatenko, L.S.; Butorina, Ye.A.; Wenzel, C.; Bartha, J.W.: Optical and structural characteristics of ZnO filmsdoped with Ga. In: SPIE 6161 6161 (2006), S. OH1–OH10

Reitz, D.; Heuer, H.; Baunack, S.; Hübner, R.; Hoffmann, V.; Menzel, S.; Wenzel, C.; Wetzig, K.: Investigation of a Ta-Si-O/Ta-Si-N bilayer system for embedded SAW finger structures. In: Microelectronic Engineering 82 82 (2006), S. 301–306

Hübner, R.; Hecker, M.; Mattern, N.; Hoffmann, V.; Wetzig, K.; Heuer, H.; Wenzel, C.; Engelmann, H.-J.; Gehre, D.; Zschech, E.: Effect of nitrogen content on the degradation mechanisms of thin Ta-Si-N diffusion barriers for Cu metallization. In: Thin Solid Films 500 500 (2006), S. 259–267

Heuer, H.; Wenzel, C.; Herrmann, D.; Hübner, R.; Chang, Z.L.; Bartha, J.W.: Thin tantalum-silicon-oxygen/tantalum-silicon-nitrogen films as high efficiency humidity diffusion barriers for solar cell encapsulation. In: Thin Solid Films 515 (2006), S. 1612–1617

Diese Informationen werden vom Vorgängersystem FIS bereitgestellt.

Dr. Steffen Strehle

Last modified: Sep 22, 2016