Veröffentlichungen Halbleitertechnik 2011 1 bis 10 von 28 EinträgenKubasch, C.; Schumacher, H.; Ruelke, H.; Mayer, U.; Bartha, J.W.: Fourier Transform Infrared Spectroscopy of Moisturized Low-k Dielectric Materials. In: Electron Devices, IEEE Transactions on 58 (2011), Nr. 9, S. 2888–2894Knaut, M.; Albert, M.; Bartha, J.W.; Dirnstorfer, I.; Mähne, H.; Jakschik, S.; Mikolajick, T.; Schlott, F.; Dubnack, K.; Kreisel, G.: Surface conditioning of the TiO2 electrode in dye-sensitized solar cells. In: Proceedings of the 26th European Photovoltaic Solar Energy Conference, Hamburg (2011)He, J.; Richter, K.; Bartha, J.W.; Howitz, S.: Fabrication of silicon template with smooth tapered sidewall for nanoimprint lithography. In: J. Vac. Sci. Technol., Seiten 06FC16-1 bis 06FC16-5 B 29(6) (2011)Bott, S.; Rzehak, R.; Vasilev, B.; Kücher, P.; Bartha, J.W.: A CMP Model Including Global Distribution of Pressure. In: IEEE Transactions on Semiconductor Manufacturing 24 (2011), Nr. 2, S. 304–314Vasilev, B.; Rzehak, R.; Bott, S.; Kücher, P.; Bartha, J.W.: Greenwood-Williamson Model Combining Pattern-Density and Pattern-Size Effects in CMP. In: IEEE Transactions on Semiconductor Manufacturing 24 (2011), Nr. 2, S. 338–347Parshina, L.S.; Novodvorsky, O.A.; Panchenko, V.Ya.; Khramova, O.D.; Cherebilo, Ye.A.; Lotin, A.A.; Wenzel, C.; Trumpaicka, N.; Bartha, J.W.: Photoluminescent properties of nitrogen and phosphorus doped ZnO thin films fabricated by pulsed laser deposition method. In: Laser Physics issue 4 21 (2011), Nr. 4, S. 790–795Geidel, M.; Knaut, M.; Albert, M.; Bartha, J.W.: In situ XPS Investigation of the Chemical Surface Composition during the ALD of ultra-thin Aluminum Oxide Films. In: IEEE 2011 Semiconductor Conference Dresden, September 27 to 28, 2011, Dresden (2011)Albert, M.; Strobel, C.; Leszczynska, B.; Zimmermann, T.; Kuske, J.; Bartha, J.W.: Dynamic VHF-PECVD Deposition with Linear Plasma Sources for Amorphous and Microcrystalline Silicon Solar Cells. In: Society of Vacuum Coaters(SVC), Technical Conference Proceedings, Chicago 2011 (2011)Benner, F.; Tarasova, M.; Moll, P.; Jakschik, S.; Dirnstorfer, I.; Knaut, M.; Mikolajick, T.: RF-Magnetron Sputtered Dielectric Backside Passivation. In: Proceedings of the 26th European Photovoltaic Solar Energy Conference, Hamburg (2011)Knaut, M.; Albert, M.; Bartha, J.W.: In-situ analytics for development and control of atomic layer deposition processes. In: 11th European Advanced Equipment Control/Advanced Process Control (AEC/APC) Conference (2011) 1 2 3 WeiterDiese Informationen werden vom Vorgängersystem FIS bereitgestellt.