Semiconductor Technology I

Opal: https://bildungsportal.sachsen.de/opal/auth/RepositoryEntry/5690753028/CourseNode/88474264202916

Prof. Dr. rer. nat. J. W. Bartha

Objectives

The lecture covers the basic technologies for the manufacturing of semiconductor devices, integrated circuits and Mircosystems. A major goal is to descibe the fundamentals to understand the interdependencies of the physical, chemical and technological mechanisms of semiconductor processing.

Content

Lecture

• Manufacturing of the substrates
• Oxidation
• Lithography
• Doping (Diffusion and Implantation)
• Deposition (PVD, CVD, Epitaxie
• Etching (Plasma)

Lecture:        Tuesday,   4. DS (13:00 h), SCH/A117/H

                        Thursday, 2. DS (09:20 h), SCH/A118/H

First lecture is on Tuesday Oct. 12’th, 13:00 h at SCH/A117/H

However, most probably, the lectures will be given virtually via web!

Lecture slides (download)

• SCT1_L01 WS20-21.pdf
• SCT1_L02 WS20-21.pdf
• SCT1_L03 WS20-21.pdf
• SCT1_L04 WS20-21.pdf
• SCT1_L05 WS20-21.pdf
• SCT1_L06 WS20-21.pdf
• SCT1_L07 WS20-21.pdf
• SCT1_L08 WS20-21.pdf
• SCT1_L09 WS20-21.pdf
• SCT1_L10 WS20-21.pdf
• SCT1_L11 WS20-21.pdf
• SCT1_L12 WS20-21.pdf
• SCT1_L13 WS20-21.pdf
• SCT1_L14 WS20-21.pdf
• SCT1_L15 WS20-21.pdf
• SCT1_L16 WS20-21.pdf
• SCT1_L17 WS20-21.pdf
• SCT1_L18 WS20-21.pdf
• SCT1_L19 WS20-21.pdf
• SCT1_L20 WS20-21.pdf
• SCT1_L21 WS20-21.pdf
• SCT1_L22 WS20-21.pdf
• SCT1_L23 WS20-21.pdf
• SCT1_L24 WS20-21.pdf
• SCT1_L25 WS20-21.pdf
• SCT1_L26 WS20-21.pdf