Publications Archive: 2014 | 2013 | 2012 | 2011 | 2010 | 2009 | 2008 | 2007 | 2006 81 bis 90 von 93 EinträgenBakke, T.; Völker, B.; Rudloff, D.; Friedrichs, M.; Schenk, H.; Lakner, H.: Large scale, drift free monocrystalline silicon micromirror arrays made by wafer bonding. In: Proceedings of SPIE 6114 (2006), S. 611402–1–611402–7Seidl, K.; Knobbe, J.; Schneider, D.; Schönherr, H.-J.; Lakner, H.: Opto-mechanical combination of a line scanning camera and a micro laser scanner system. In: International Archives of Photogrammetry, Remote Sensing and Spatial Information Sciences XXXVI Part 5 (2006)Bakke, T.; Friedrichs, M.; Völker, B.; Reiche, M.; Leonardsson, L.; Schenk, H.; Lakner, H.: Spatial light modulators with monocrystalline silicon micromirrors made by wafer bonding. In: Proceedings of SPIE vol. 5715 (2005), S. 69–79Klose, T.; Kunze, D.; Sandner, T.; Schenk, H.; Lakner, H.; Schneider, A.; Schneider, P.: Stress optimization of a micromechanical torsional spring. In: Technical Proceedings of the 2005 Nanotechnology Conference and Trade Show vol. 3 (2005), S. 602–605Schenk, H.; Wolter, A.; Dauderstädt, U.; Gehner, A.; Lakner, H.: Micro-opto-electro-mechanical systems technology and its impact on photonic applications. In: J. Microlith., Microfab., Microsyst. 4 (4) (2005), S. 1–11Wolter, A.; Hsu, S.-T.; Schenk, H.; Lakner, H.: Applications and requirements for MEMS scanner mirrors. In: Proceedings of SPIE vol. 5719 (2005), S. 64–75Schelinski, U.; Bergmann, A.; Dallmann, H. G.; Gerwig, C.; Kleinmann, L.; Lakner, H.; Nauber, P.; Neumann, H.; Scholles, M.; Wolter, A.: Novel 3D scanner based on electrostatically driven resonant micromirrors. In: Proceedings of SPIE vol. 5873 (2005), S. 95–104Sandner, T.; Schmidt, J. U.; Schenk, H.; Lakner, H.; Gatto, A.; Yang, M.; Kaiser, N.; Braun, S.; Foltyn, T.; Leson, A.: Highly reflective coatings for micromechanical mirror arrays operating in the DUV and VUV spectral range. In: Proceedings of SPIE vol. 5721 (2005), S. 72–80Dauderstädt, U.; Dürr, P.; Ljungblad, U.; Karlin, T.; Schenk, H.; Lakner, H.: Mechanical stability of spatial light modulators in microlithography. In: Proceedings of SPIE vol. 5721 (2005), S. 64–71Sandner, T.; Schmidt, J. U.; Schenk, H.; Lakner, H.; Braun, S.; Foltyn, T.; Leson, A.; Gatto, A.; Yang, M.; Kaiser, N.: Micromechanical scanning mirrors with highly reflective NIR coatings for high power applications. In: Proceedings of SPIE vol. 5721 (2005), S. 34–42Zurück 1 2 3 4 5 6 7 8 9 10 WeiterDiese Informationen werden vom Vorgängersystem FIS bereitgestellt.