Semiconductor Technology I

OPAL: https://bildungsportal.sachsen.de/opal/auth/RepositoryEntry/5690753028/CourseNode/88474264202916

Prof. Dr. rer. nat. Stefan Mannsfeld 
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Objectives:

The lecture covers the basic technologies for the manufacturing of semiconductor devices, integrated circuits and Microsystems. A major goal is to describe the fundamentals to understand the interdependencies of the physical, chemical and technological mechanisms of semiconductor processing.

Content:

• Wafer fabrication
• Lithography
• Layer Deposition
• Cleaning and Structuring
• Planarization
• Doping
• Complete CMOS Process
• Process Control