Abgeschlossene Dissertationen
Optimierung und Anwendung der Schwingquarzmesstechnik zur Untersuchung und Kontrolle der Atomlagenabscheidung
Art der Abschlussarbeit
Dissertation
Autoren
- Knaut, Martin
Betreuer
- Prof. Dr. rer. nat. Johann Wolfgang Bartha
Weitere Betreuer
Prof. J. Heitmann (Bergakademie Freiberg)
Abstract
Topic and goal of this work is the optimization and application of quartz crystal microbalance (QCM) measurements for atomic layer deposition (ALD) processes. After analyzing the fundamentals of the QCM technique regarding special aspects in combination with ALD, process conditions and parameters affecting the QCM resonance frequency have been evaluated. Since the impact of temperature fluctuations turned out to be crucial, sensor heads and methods to compensate temperature effects have been developed and implemented. This optimization enabled a very fast and completely QCM based process development for hafnium oxide atomic layer deposition by characterizing various process parameters and their interactions in high detail using hundreds of short processes. The monitoring of the initial film growth of aluminum oxide and titanium oxide on the other material allowed to study substrate effects during the first ALD cycles and to improve process control for the deposition of mixed films and laminates. Further, ALD in porous materials was analyzed by using quartz crystals coated with porous films. With this approach, the coating of the inner surface of porous materials by an ALD process was directly observable enabling the characterization of process parameter impacts on the gas transport and the ALD film growth in porous media
Zugeordnete Forschungsschwerpunkte
- * Atomic Layer Deposition (ALD)
Schlagwörter
-
Berichtsjahr
2017