Dr. Marko Swoboda

2025

• Method for manufacturing cdte based thin film solar cell with graded refractive index profile within the cdte-based absorber layer and cdte based thin film solar cell with graded refractive index profilePeng, S., Ma, L., Fu, G., Yin, X., Arndt, R. & Swoboda, M., 27 Nov 2025, IPC (International Patent Classification) H10F 77/ 42 A I, United States Patent and Trademark Office (PTO), Patent No. US2025366253, 8 Jun 2022, Priority date 8 Jun 2022, Priority No. WO2022CN97642Research output: Intellectual Property > Patent application/Patent
• SEMICONDUCTOR WAFER SPLITTING METHODBeyer, C., Santos Rodriguez, F. J., Schulze, H. & Swoboda, M., 4 Sep 2025, IPC (International Patent Classification) H10D 84/ 03 A I, Patent No. US2025280591, Priority date 16 May 2025, Priority No. US202519210065Research output: Intellectual Property > Patent application/Patent
• CDTE-BASIERTE DÜNNSCHICHTSOLARZELLENVORRICHTUNG MIT DIFFUSIONSSPERRSCHICHT UND HERSTELLUNGSVERFAHREN DAFÜRPeng, S., Ma, L., Yin, X., Fu, G., Arndt, R. & Swoboda, M., 20 Aug 2025, Patent No. EP4602655, Priority date 14 Oct 2022, Priority No. WO2022CN125288Research output: Intellectual Property > Patent application/Patent
• VERFAHREN ZUR HERSTELLUNG EINER KUPFERFREIEN CDTE-BASIERTEN DÜNNSCHICHTSOLARZELLENVORRICHTUNGPeng, S., Yin, X., Fu, G., Ma, L., Arndt, R., Papageorgiou, G., Drost, C. & 1 others, 23 Jul 2025, Patent No. EP4588110, Priority date 15 Sep 2022, Priority No. WO2022CN119060Research output: Intellectual Property > Patent application/Patent
• VERFAHREN ZUM ERZEUGEN VON KURZEN UNTERKRITISCHEN RISSEN IN FESTKÖRPERNRichter, J., Swoboda, M., Ullrich, A. & Rieske, R., 2 Apr 2025, IPC (International Patent Classification) B23K 103/ 00 A N, Patent No. EP4530011, Priority date 19 Feb 2019, Priority No. EP20190706949Research output: Intellectual Property > Patent application/Patent

2024

• METHOD AND APPARATUS FOR PRODUCING AT LEAST ONE MODIFICATION IN A SOLID BODYRieske, R., Swoboda, M. & Ullrich, A., 12 Dec 2024, IPC (International Patent Classification) H01L 21/ 78 A I, Patent No. US2024413023, Priority date 21 Aug 2024, Priority No. US202418811003Research output: Intellectual Property > Patent application/Patent

2023

• Method for Separating Wafers from Donor SubstratesSwoboda, M. D., Beyer, C., Rieske, R., Ullrich, A. & Richter, J., 7 Dec 2023, IPC (International Patent Classification) B28D 5/ 00 A I, Patent No. US2023390961, Priority date 23 Aug 2023, Priority No. US202318454474Research output: Intellectual Property > Patent application/Patent
• Parent Substrate, Wafer Composite and Methods of Manufacturing Crystalline Substrates and Semiconductor DevicesRieske, R., Binter, A., Diewald, W., Goller, B., Graf, H., Lackner, G., Richter, J. & 3 others, 19 Oct 2023, IPC (International Patent Classification) H01L 21/ 78 A I, Patent No. US2023330769, Priority date 16 Jun 2023, Priority No. US202318336643Research output: Intellectual Property > Patent application/Patent
• VERFAHREN ZUM ABTRENNEN DURCH LASERBESTRAHLUNG EINER FESTKÖRPERSCHICHT VON EINEM FESTKÖRPERRieske, R., Swoboda, M. & Richter, J., 19 Apr 2023, IPC (International Patent Classification) B23K 103/ 00 A N, Patent No. EP4166270, Priority date 22 Mar 2017, Priority No. EP20170712966Research output: Intellectual Property > Patent application/Patent
• VERFAHREN ZUM ERZEUGEN VON MINDESTENS EINER ZUMINDEST ABSCHNITTWEISE GEWÖLBTEN ODER GEBOGENEN FESTKÖRPERSCHICHTRieske, R., Swoboda, M. & Richter, J., 19 Apr 2023, IPC (International Patent Classification) B23K 103/ 00 A N, Patent No. EP4166271, Priority date 22 Mar 2017, Priority No. EP20170712966Research output: Intellectual Property > Patent application/Patent