Publications

1993

• A Low-temperature Process for Device-quality Si/sio2 Interfaces on Si(111)YASUDA, T., LEE, D., BJORKMAN, C., MA, Y., LUCOVSKY, G., EMMERICHS, U., MEYER, C. & 2 others, 1993, Materials Research Society Symposium Proceedings. Vol. 315. p. 375-380, 6 p.Electronic (full-text) versionResearch output: Contribution to book/conference proceedings/anthology/report > Conference contribution