Equipment

Rasterelektronenmikrsokop  Quanta^TM 650 FEG

© M.Kretzschmar

• Voltage: 200 V bis 30 kV
• High-resolution Schottky field emission source
• Electron beam resolution
  • 1,4 nm in low vacuum
    (10-4000 Pa)
  • 1,0 nm in high vacuum
• Detectors

  • SE

  • ETD

  • LF-GSED

  • GSED

  • BS

  • ESEM GAD
• Magnification: 6x to 1 000 000x