Publikationen der Professur für Halbleitertech­nik

131 bis 140 von 284 Einträgen

Junige, M.; Geidel, M.; Knaut, M.; Albert, M.; Bartha, J.W.: Atomic layer deposition monitored and characterized by joint in situ real-time spectroscopic ellipsometry and direct surface analysis. In: AVS 59th Annual International Symposium and Exhibition : October 28 – November 02, 2012, Tampa, Florida, USA. Tampa, Florida, 2012 Vortrag (2012)

Geidel, M.; Hossbach, C.; Knaut, M.; Albert, M.; Bartha, J.W.: In-situ analysis of Al2O3 ALD growth on PET and PEN substrates for flexible organic electronics. In: 12th International Conference on Atomic Layer Deposition AVS-ALD & Baltic ALD 2012: June 18 – 20, 2012, Dresden, Germany. Vortrag (2012)

Henke, T.; Hossbach, C.; Knaut, M.; Geidel, M.; Singh, A.; Albert, M.; Bartha, J.W.: Densification of Low-Temperature ALD Aluminum Oxide Thin Films by in-situ Flash Annealing. In: Proceedings of AVS 12th International Conference on Atomic Layer Deposition, June 17 – 20, 2012, Dresden, Germany (2012)

Knaut, M.; Junige, M.; Wojcik, H.; Neumann, V.; Hiess, A.; Henke, T.; Albert, M.; Bartha, J.W.; Hoßbach, C.: Atomic layer deposition for high aspect ratio through silicon vias. In: Materials for Advanced Metallization 2012, Grenoble, France (2012)

Kubasch, C.; Schumacher, H.; Ruelke, H.; Mayer, U.; Bartha, J.W.: Fourier Transform Infrared Spectroscopy of Moisturized Low-k Dielectric Materials. In: Electron Devices, IEEE Transactions on 58 (2011), Nr. 9, S. 2888–2894

Knaut, M.; Albert, M.; Bartha, J.W.; Dirnstorfer, I.; Mähne, H.; Jakschik, S.; Mikolajick, T.; Schlott, F.; Dubnack, K.; Kreisel, G.: Surface conditioning of the TiO2 electrode in dye-sensitized solar cells. In: Proceedings of the 26th European Photovoltaic Solar Energy Conference, Hamburg (2011)

He, J.; Richter, K.; Bartha, J.W.; Howitz, S.: Fabrication of silicon template with smooth tapered sidewall for nanoimprint lithography. In: J. Vac. Sci. Technol., Seiten 06FC16-1 bis 06FC16-5 B 29(6) (2011)

Bott, S.; Rzehak, R.; Vasilev, B.; Kücher, P.; Bartha, J.W.: A CMP Model Including Global Distribution of Pressure. In: IEEE Transactions on Semiconductor Manufacturing 24 (2011), Nr. 2, S. 304–314

Vasilev, B.; Rzehak, R.; Bott, S.; Kücher, P.; Bartha, J.W.: Greenwood-Williamson Model Combining Pattern-Density and Pattern-Size Effects in CMP. In: IEEE Transactions on Semiconductor Manufacturing 24 (2011), Nr. 2, S. 338–347

Parshina, L.S.; Novodvorsky, O.A.; Panchenko, V.Ya.; Khramova, O.D.; Cherebilo, Ye.A.; Lotin, A.A.; Wenzel, C.; Trumpaicka, N.; Bartha, J.W.: Photoluminescent properties of nitrogen and phosphorus doped ZnO thin films fabricated by pulsed laser deposition method. In: Laser Physics issue 4 21 (2011), Nr. 4, S. 790–795

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Martin Knaut
Letzte Änderung: 05.10.2022