Dr.-Ing. Philipp J. Mehner

Modeling and Simulation of MEMS:

• Development and optimization of silicon-based, electrostatic MEMS, including accelerometers, gyroscopes, and micromirrors.

• Application and comparison of various modeling techniques and tools, such as FEM (Ansys, Comsol), signal flow (Matlab Simulink), and network description (LTspice).

Rapid Prototyping and Manufacturing Technologies:

• Investigation and application of UV-Laser-Ablation techniques for the fabrication of MEMS for fundamental research.

• Analysis of manufacturing tolerances (including SEM).

Experimental Validation:

• Experimental verification of modeling results and ensuring the accuracy, reliability, and robustness of the developed models.

Dissertation: “Modeling and Simulation of Components and Circuits with Intrinsically Active Polymers” using FEM (Ansys), signal flow graphs (Matlab Simulink), and network description (LTspice).

• Praktikumsversuch MST: MME 1 – SIMULATION MIKROMECHANISCHER AKTOREN

• Google Scholar