Research Services

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Surface characterization

For imaging of the surface topography a high-resolution Scanning Electron Microsope (SEM) equipped with a cold field emission electron source is available. In a further analytical SEM the analytics can be carried out in micro-ranges near to the surface with regard to quantitative determination of the chemical composition with a modern Energy Dispersive X-ray Spectrometer (EDX) with highest energy resolution.

The X-ray photoelectron spectroscopy (XPS) and the Auger electron spectroscopy (AES) allow a characterization of only a few atomic layers through to thin layers. This contains the quantitative determination of the chemical composition, the binding energy und therefore also the distinction of various oxidation states on the sample surface. The existing Argon sputter ion gun enables thereby besides removal of layers of contamintation from the specimen surface also a depth profile analysis.

In the fields of materials characterization

• High-resolution imaging of surfaces by means of (cold) Field Emission Scanning Electron Microsopy (FE-SEM)
• Electron microscopic direct imaging of electrical nonconductive surfaces (polymers, hydrogels, resists etc.) using Low Vacuum Scanning Electron Microsopy (LVSEM),
• Electron Probe Microanalysis in the near surface micro region by  Energy Dispersive X-ray Spectroscopy (EDX) with highest energy resolution (123 eV at Mn-Kα)
• Characterization of surfaces by means of X-ray Photoelectron Spectroscopy (XPS) with regard to the chemical composition, binding energy and the oxidation state

Equipment

• Field Emission Scanning Electron Microsope Hitachi S-4700 II
• Low Vacuum Scanning Electron Microsope JEOL JSM-6610 LV (LaB₆-Kathode) equipped with Energy Dispersive X-ray Spectrometer Bruker X-Flash | 10 Silicon Drift Detector (SDD)
• X-ray  Photoelectron Spectrometer Physical Electronics PHI ESCA 5700

Examples for Publikations

• E. Langer, L. Potapov, J.  Kopecek (2025)  Investigations of the ferromagnetic shape memory alloy Co-Ni-Al by X-ray Kossel microdiffraction,  IOP Conf. Ser.: Mater. Sci. Eng. 1324 012009-1-10.
• H. Harija, E. Langer, A. Prokopchuk, B. Saran, I. Arief, A. Nag , A. Das , A. Richter, M. E. Altinsoy (2024) A Piezoresistive Cork-Based Sustainable and Robust Sensor for Force-Sensing Application, IEEE Sensor Journal, 24, 31867-31874.
• M. Franke, I. Slowik, E. Langer, K. Leo, A. Richter (2020) Surface and mechanical analysis of metallized poly(dimethylsiloxane) gel for varifocal micromirrors, Surface and Interface Analysis, 52, Issue 12, 1163-1170.
• M. Lykova, E. Langer, K. Hinrichs, I. Panchenko, J. Meyer, U. Künzelmann, M.J. Wolf, K.D. Lang (2018) Characterization of self-assembled monolayers for Cu-Cu bonding technology, Microelectronic Engineering 292, 19-24.
• S. Haefner, Ph. Frank, E. Langer, D. Gruner, U. Schmidt, M. Elstner, G. Gerlach, A. Richter (2017) Chemically controlled micro-pores and nanofilters for separation tasks in 2D and 3D microfluidic systems, RSC Adv.,  7, 492797.

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Scientific associate

Name

Mr Dr. rer. nat. Enrico Langer

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Organization Name

Chair of Microsystems

Chair of Microsystems

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N67, Room B.211 Nöthnitzer Straße 67

01187 Dresden

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