Our chair holds strong partnerships all across the world
The Chair of Nanoelectrics offers all available techniques and technologies of micro- and nanoelectronics, micro systems technology and sensors to all TU Dresden members and to all external facilities and companies. The development and realization of custom solutions to your requests is in the center of our efforts.
The Chair of Nanoelectronics holds strong partnerships to other universities, research institutes and industry companies.
Research services of the Chair of Nanoelectronics
The techniques and technologies of microelectronics, microsystems technology and sensor technology available at the Chair of Nanoelectronics are also available to employees of the TU Dresden and institutions or companies outside the TU Dresden. The focus is on the development and realization of customer-specific solutions.
These research services are illustrated using a few examples:
- Wafer coatings (oxidation; PECVD, ALD and PVD processes for the production of functional layers and layer systems, diffusion barriers, metallization of various applications)
- Layer structuring (chemical wet and dry etching)
- Abrasive cutting of various substrates (max. 200mm diameter) and substrate materials (Si, sapphire, glass)
- Additive and subtractive wiring technologies (damascene structuring)
- Wafer bumping
- Si deep etching for MEMS, MOEMS and microfluidics
- X-ray nanolenses
- Thin film capacitors
- Electrical measurement techniques (C-V, I-V, breakdown, TVS, characterization of solar cells) e.g. vacuum probers for humidity and heat tests
- Focused ion beam
- Microwire coatings
All existing or applicable technologies are wafer-based and, with the exception of ion implantation, include all typical processes for the production of integrated circuits and Si-based microsystems.
Such work begins with an intensive discussion and consultation on the objectives and realization possibilities. If necessary, preliminary tests are carried out to minimize the risk of failure. Afterwards, a binding offer is usually made for the costs, which are made up of the actual costs and a university surcharge. The General Terms and Conditions of TU Dresden apply. The research services are carried out to the best of our knowledge, but we cannot accept any liability for the results.
Further information and inquiries: