Prof. Dr. rer. nat. Thomas Arnold
| Titel | Prof. Dr. rer.nat. |
| First name | Ulrich Thomas |
| Name | Arnold |
| Position | Head of Chair of Ultra-precision Surface Machining using Ions and Plasmas (with IOM Leipzig) Head field of research 1: Ultra-precision Surfaces at Leibniz Institute of Surface Engineering Leipzig (IOM) |
| Current institution(s), country | - Technische Universität Dresden, Germany - Leibniz Institute of Surface Engineering Leipzig (IOM) |
| ORCID-ID | 0000-0002-3666-2415 |
| Nationality(ies) | german |
Qualification and career
| Stations | Time periods and more details |
| Studies | 1995 - 2000: Studies of physics at University of Leipzig Diploma degree |
| Promotion | 2005: Doctorate (Dr. rer. nat.), topic of dissertation: "Analysis of plasma-surface interaction during etching of silicon with an Ar/SF6/O2 plasma jet" |
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Stages of the scientific/ |
Since 2021: Head field of research 1: Ultra-precision Surfaces at Leibniz Institute of Surface Engineering at IOM Leipzig Since 2020: Head of the Chair of Ultra-precision Surface Machining using Ions and Plasmas, Dresden University of Technology (with IOM Leipzig) Since 2014: Head of the Endowed Professorship for Ultra-precision Machining of Surfaces using Ions and Plasmas, Dresden University of Technology (with IOM Leipzig) 2013 - 2021: Group leader non-conventional ultra-precision machining, later ultra-precision shaping with plasmas and ions at IOM Leipzig 2007 - 2012: Group leader Process Development for Plasma and Ion Technology at IOM Leipzig 2000 - 2007: Research assistant at Leibniz Institute of Surface Engineering Leipzig (IOM) |
Commitment to the science system
- Reviewer of several international journals
- Member of Deutsche Gesellschaft für angewandte Optik (DGaO)
- Member of OPTICA (formely OSA)
- Member of Deutsche Physikalische Gesellschaft (DPG)
Researcher supervision
- 6 PhD students completed/graduated
- 9 Diploma students (M.Sc., Dipl.-Ing.) completed/graduated
- Currently direct supervisor of 4 PhD students
Scientific results
Technical papers in peer-reviewed journals / contributions to conferences or anthologies, each with peer review / book publications (short selection)
1. H. Müller, Th. Arnold, Surface morphology in plasma jet polishing: theoretical description and application, J. Eur. Opt. Soc. Rapid Publ. 19 (2023) 37, 10.1051/jeos/2023034
2. F. Hölzel, D. Rolón, J. Bauer, J. Kober, S. Kühne, F. Pietag, D. Oberschmidt, T. Arnold,
Reactive ion beam smoothing of rapidly solidified aluminum (RSA) 501 surfaces for potential visible and ultraviolet light applications, Surf. Interfaces 38 (2023) 102784, 10.1016/j.surfin.2023.102784.
3. M. Rudolph, P. Birtel, T. Arnold, A. Prager, S. Naumov, U. Helmstedt, A. Anders, P.C. With, Low-temperature atmospheric pressure plasma conversion of polydimethylsiloxane and polysilazane precursor layers to oxide thin films, Plasma Process Polym. 5 (2023) 2200229, 10.1002/ppap.202200229.
4. H. Müller, T. Waak, U. Birnbaum, G. Böhm, T. Arnold, Atmospheric plasma jet processing for figure error correction of an optical element made from S-BSL7, J. Eur. Opt. Soc. Rapid Publ. 18 (2022) 4; 10.1051/jeos/2022003
5. M. Ulitschka, J. Bauer, F. Frost, T. Arnold, Improvement of the optical properties after surface error correction of aluminum mirror surfaces, J. Eur. Opt. Soc. Rapid Publ. 17 (2021) 1; 10.1186/s41476-020-00143-6
6. F. Kazemi, G. Boehm, T. Arnold, Recursive algorithm for modeling non-linear etching rates in reactive plasma jet based optical surface machining of borosilicate crown glass, Precis. Eng. 72 (2021) 205-214; 10.1016/j.precisioneng.2021.04.013
7. F. Kazemi, T. Arnold, P. Lorenz, M. Ehrhardt, K. Zimmer, Combined reactive plasma jet-laser etching method for technical optical glass containing metal oxides, Appl. Surf. Sci. 515 (2021) 149339; 10.1016/j.apsusc.2021.149339
8. F. Kazemi, G. Boehm, Th. Arnold, An investigation on effectiveness of temperature treatment for fluorine‐based reactive plasma jet machining of N‐BK7®, Plasma Processes and Polymers (2020) e2000016; 10.1002/ppap.202000016
9. M. Ulitschka, J. Bauer, F. Frost, T. Arnold, Ion beam planarization of optical aluminum surfaces, J. Astron. Telesc. Instrum. Syst. 6 (2020) 014001; 10.1117/1.JATIS.6.1.01400
10. M. Ulitschka, J. Bauer, G. Dornberg, F. Frost, T. Arnold, Local smoothing of optical aluminum surfaces by reactive ion beam etching, Opt. Eng. 59 (2020) 035108; 10.1117/1.OE.59.3.035108
Contributions to conferences or edited volumes, each without peer review / Patents applied for and granted (short selection)
1. R. Heinke, T. Arnold, M. Ehrhardt, P. Lorenz, K. Zimmer, Combining atmospheric pressure plasma jet processing with pulsed laser ablation for ultra-precise processing of technical glasses, 2023 EMRS Spring Meeting, Strasbourg, France, 29.05.-02.06. 2023
2. H. Müller, Th. Arnold, Plasma jet polishing of optical surfaces, 10th European Seminar on Precision Optics Manufacturing, Deggendorf Institute of Technology, Teisnach, Germany, 18.04. 2023
3. F. Hoelzel, H. Mueller, G. Boehm, H. Paetzelt, T. Arnold, Präzisionsbearbeitung mit plasmajet machining, Plasma Germany Frühjahrssitzung, Leipzig, Germany, 26.-27.04. 2023
4. F. Hölzel, D. Rolón, J. Bauer, T. Arnold, Reactive ion beam etching of aluminum UV-VIS optics, Photonic Days Berlin Brandenburg 2022, Berlin, Germany, 05.-06.10. 2022
5. T. Arnold, F. Pietag: Vorrichtung und Verfahren zum Schalten einer Ionenstrahlquelle, DE102020103218A1 (2021).
6. T. Arnold, M. Ehrhardt, F. Kazemi, P. Lorenz, K. Zimmer, Klaus: Verfahren zur Bearbeitung einer Oberfläche eines Festkörpers, DE102020001774A1 (2021).
7. T. Arnold, J. Bauer, F. Frost, M. Ulitschka: Verfahren zum Glätten von Oberflächen, DE102019111684A1 (2020).
8. T. Arnold, G. Böhm, M. Ehrhardt, H. Paetzelt, K. Zimmer, Verfahren zur 3D-Strukturierung und Formgebung von Oberflächen aus harten, spröden und optischen Materialien, DE102012010635B4 (2022)
9. T. Arnold, G. Böhm, H. Paetzelt, Vorrichtung zur Erzeugung eines Plasma- oder Radikalstrahles DE202017103165U1 (2017)
10. T. Arnold, F. Pietag: Vorrichtung zum Schalten einer Ionenstrahlquelle, DE202020100668U1 (2020)