Profile

Research and working areas:

Development of plasma- and ion beam based processes, tools and systems for ultra-precision machining preferably of optical surfaces and the generation of surface shapes and structures in the accuracy range of a few nanometers.

Main focus in research and teaching:

• Deterministic fabrication and correction of complex optical surfaces (aspherical or free-form surfaces on elements of glasses, crystals, ceramics and metals) with target accuracies in the nanometer range
• Development of additive and subtractive non-conventional processing methods
• Ion- and plasma-assisted structuring and smoothing of optical surfaces
• Development of process chains with significant participation Ion beam and plasma-assisted machining processes
• Development and optimization of ion and plasma tools and entire processing systems
• Optimization of ultra-precision surface metrology processes
• Basic research on interaction mechanisms of plasma and ion beam tools with surfaces
• Process simulation

Contact:

Phone: +49 (0)341 235 3120
Email: Prof. Dr. Thomas Arnold