Introducing the Chair

The Chair of Ultra-Precision Surface Machining Using Ions and Plasmas (as joint appointment between TU Dresden and Leibniz Institute of Surface Engineering (IOM) in Leipzig) emerged from the industry-related Endowed Chair of Ultra-Precision Surface Machining Using Ions and Plasmas (GB/IOM Leipzig). It deals with the research and development of particle beam-based tools with atomic mechanisms of action and their application in processes and process chains, e.g. for the production of modern optical surfaces. Here, accuracies in the nanometer range are required on complex surface contours such as aspheres and free-form surfaces. The aim is to produce high-precision surfaces in terms of their shape as well as their waviness and micro-roughness.

The Chair endeavors to impart up-to-date knowledge on the core research areas through lectures and seminars as well as theses and dissertations.

The working group works and researches at the Leibniz Institute of Surface Engineering (IOM) in Leipzig.