Plasma Technology
(Last updated: Sep. 2026)
The course covers the fundamentals of vacuum technology, plasma physics, industrial plasma processes, and process tool design, as well as introduces students to basics of thin film growth, provides examples of different types of coatings used today, such as hard coatings and barriers, glass and optical coatings, electronic and functional coatings, organic electronics, as well as plasma-based treatment technologies. The students will gain a fundamental understanding of the physics of plasmas used in industrial processes and tools. Furthermore, they will be able to choose suitable technical plasma sources and plasma process tools for specific applications. In addition, students will become familiar with typical examples for layers and layer stacks used in major application fields for coatings.
| lecturer | Prof. Elizabeth von Hauff, Dr. Agne Zukauskaite |
| Module | ET-12 11 05 & NES-ET-E PlaTe |
| V/Ü/P | 4/2/0 |
| Semester | Winter semester 2026/27 |
| Language | English |
| When | Lecture Thursday 13:00 - 16:20 Seminar Friday 14:50 - 16:20 |
| Where | BAR E85 |
| Material | OPAL, Course Notification |
| Contents |
After completing this module, students will be familiar with:
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