Chair of Nanoelectronics

The Chair of Nanoelectronics has its research focus on the technologies, materials and devices of micro- and nanotechnology and the corresponding process integration of semiconductor technology. Our research is about the interaction between processing steps and thin film materials, basic material research and the resulting semiconductor devices. The necessary know-how demands a broad knowledge from natural and engineering science.

The chair maintains and supplies a 400m² large cleanroom laboratory, which partly surpasses industry standards. Even though the cleanroom was developed for "on-chip-interconnects", the chair of Prof. Mikolajick also works on projects with wafer-based structures and electronic packaging technology (flip-chip-bumping, through-silicon-via technology, 3D-integration), micro-electro-mechanical systems (MEMS) and optoelectronic devices, graphen-based processes or silicon-based thin film solar cells. A major part of our work is dedicated towards atomic layer deposition (ALD) process research, that can be investigated with a unique combination of in-situ analytical techniques for surfaces and films.

For teaching, the following courses are organized by the Chair of Nanoelectronics:

Teaching