Research on the pace of time
The research projects at the Chair of Nanoelectronics are focused mainly on development of single process steps and process integration in semiconductor technology. Research inclused the micro- and nanostructuring of semiconductors, insulators and metals and the corresponding analytical techniques. The technical equipment of the cleanroom laboratory allows realization of test structures, where all necessary process steps of vacuum deposition of metals and insulators, wet and dry etching, electrochemical deposition and chemical-mechanical polishing are available in-house.
Research at the Chair of Nanoelectronics
Research at the IHM focuses on the micro- and nanostructuring of semiconductors, insulators and metals and the associated electrical, mechanical and thermal effects. The technical equipment in the Institute's clean room enables the realization of test structures, complex devices and (3D) integration, whereby all essential technologies of vacuum coating of metals and insulators, dry and wet etching, electrochemical coating and chemical-mechanical polishing are available. Extensive physical, chemical and electrical characterization options are available.