Research on the pace of time

The research projects at the Chair of Nanoelectronics are focused mainly on development of single process steps and process integration in semiconductor technology. Research inclused the micro- and nanostructuring of semiconductors, insulators and metals and the corresponding analytical techniques. The technical equipment of the cleanroom laboratory allows realization of test structures, where all necessary process steps of vacuum deposition of metals and insulators, wet and dry etching, electrochemical deposition and chemical-mechanical polishing are available in-house.

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