Publikationen der Professur für Halbleitertech­nik

51 bis 60 von 284 Einträgen

Rebohle, L.; Schumann, T.; Prucnal, S.; Skorupa, W.; Henke, T.: Temperature distribution during flash lamp annealing of thin film multilayer systems : Vortrag. In: E-MRS 2015 Fall Meeting, 15-18 September 2015, Warsaw, Poland, 2015 (2015)

Henke, T.; Knaut, M.; Hoßbach, C.; Geidel, M.; Rebohle, L.; Albert, M.; Skorupa, W.; Bartha, J.W.: Flash-Enhanced Atomic Layer Deposition: Basics, Opportunities, Review, and Principal Studies on the Flash-Enhanced Growth of Thin Films. In: ECS Journal of Solid State Science and Technology 4 (2015), Nr. 7, S. 277–287

Junige, M.; Sharma, V.; Tanner, R.; Schmidt, D.; Pribil, G.; Albert, M.; Schubert, M.; Bartha, J.W.: In-situ real-time Spectroscopic Ellipsometry for the monitoring and control of kinetic processes in oxide, nitride, and metal ALD : Poster. In: AVS 15th International Conference on Atomic Layer Deposition : June 28 – July 1, 2015, Portland, Oregon, USA. Portland, 2015 (2015)

Junige, M.; Sharma, V.; Tanner, R.; Schmidt, D.; Pribil, G.; Albert, M.; Schubert, M.; Bartha, J.W.: In-situ real-time monitoring and control of kinetic processes in Atomic Layer Depositions by Spectroscopic Ellipsometry with 1.25 Hz sampling rate : Poster. In: 2015 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN) : April 14-16, 2015 Dresden, Germany. Dresden, 2015 (2015)

Junige, M.; Oddoy, T.; Geidel, M.; Darakchieva, V.; Yakimova, R.; Wenger, C.; Lupina, G.; Albert, M.; Schubert, M.; Bartha, J.W.: In-situ real-time Spectroscopic Ellipsometry for the investigation of Atomic Layer Depositions on Graphene. : Poster. In: 9th Workshop Ellipsometry : February 23-25, 2015 University of Twente in Enschede, the Netherlands (2015)

Geidel, M.; Junige, M.; Adolphi, B.; Wenger, C.; Lupina, G.; Yakimova, R.; Darakchieva, V.; Albert, M.; Bartha, J.W.: In-vacuo X-ray Photoelectron Spectroscopy for the investigation of pristine as well as pre-treated Graphene : Vortrag. In: 2015 E-MRS Spring Meeting and Exhibit : May 11-15, 2015, Lille, France. Lille, 2015 (2015)

Junige, M.; Oddoy, T.; Yakimova, R.; Darakchieva, V.; Wenger, C.; Lupina, G.; Albert, M.; Bartha, J.W.: In-vacuo study of functionalization approaches for the ALD of high-k dielectrics on graphene : Vortrag. In: AVS 15th International Conference on Atomic Layer Deposition : June 28 – July 1, 2015, Portland, Oregon, USA. Portland, 2015 (2015)

Junige, M.; Oddoy, T.; Yakimova, R.; Darakchieva, V.; Wenger, C.; Lupina, G.; Kitzmann, J.; Albert, M.; Bartha, J.W.: Atomic Layer Deposition of Al2O3 on NF3-pre-treated graphene. In: Ion M. Tiginyanu (Hrsg.): Nanotechnology VII : May 4-6, 2015, Barcelona, Spain. Barcelona, 2015 (Proceedings of SPIE, 9519) (2015), S. 951915

Krug, M.; Abidin, A.Z.; Wolf, M.; Kozera, R.; Knaut, M.; Endler, I.; Michaelis, A.: Evaluation of alumina as protective coating for carbon fibers in magnesium-based composites. In: 20th International Conference on Composite Materials (ICCM20), Copenhagen, Denmark (2015)

Knaut, M.; Dirnstorfer, I.; Albert, M.; Bartha, J.W.: In-situ QCM monitoring of ALD in porous materials. In: 15th AVS conference on Atomic Layer Deposition, Portland, OR, USA (2015)

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Martin Knaut
Letzte Änderung: 05.10.2022