Publikationen der Professur für Halbleitertech­nik

81 bis 90 von 284 Einträgen

Junige, M.; Walther, T. F.; Tanner, R.; Albert, M.; Bartha, J. W.: Growth kinetics and film properties of tantalum nitride ALD investigated by in-situ real-time ellipsometry and in-vacuo surface analysis. In: 12th International Baltic ALD conference, At Helsinki, Finland, 12.-13.05.2014 Vortrag (2014)

Junige, M.; Tanner, R.; Wenger, C.; Lupina, G.; Albert, M.; Bartha, J. W.: Ta2O5 by thermal-activated ALD. In: Conference: DPG Frühjahrstagung Dresden, 30.03.-04.04.2014 Vortrag (2014)

Strobel, C.; Leszczynska, B.; Leszczynski, S-; Merkel, U.; Kuske, J.; Fischer, D. D.; Albert, M.; Holovský, J.; Bartha, J. W.: Static and Dynamic VHF-Deposition of Microcrystalline Silicon at 140 MHz with Rates Up to 2.5 Nm/s. In: 29th European Photovoltaic Solar Energy Conference and Exhibition, Amsterdam (2014), S. 1917–1920

Seiboth, F.; Scholz, M.; Patommel, J.; Hoppe, R.; Wittwer, F.; Reinhardt, J.; Seidel, J.; Knaut, M.; Jahn, A.; Richter, K.; Bartha, J. W.; Falkenberg, G.; Schroer, C. G.: Hard x-ray nanofocusing by refractive lenses of constant thickness. In: Appl. Phys. Lett. 105, 131110 (2014) (2014)

Henke, T.; Knaut, M.; Hossbach, C.; Geidel, M.; Rebohle, L.; Albert, M.; Skorupa, W.; Bartha, J. W.: Flash-Lamp-Enhanced Atomic Layer Deposition of Thin Films. In: 226th ECS-Meeting, Symposium P1 - Atomic Layer Deposition Applications 10, 5.-9. Oktober 2014, Cancun, Mexiko ECS Transactions 64 (9) (2014), S. 167–189

Henke, T.; Bartha, J.W.; Rebohle, R.; Merkel, U.; Hübner, R.; Albert, M.; Skorupa, W.: Formation of regularly arranged large grain silicon islands by using embedded micro mirrors in the flash crystallization of amorphous silicon. In: Journal of Applied Physics 115, 034301 (2014)

Singh, A.; Klumbies, H.; Schröder, U.; Müller-Meskamp, L.; Geidel, M.; Knaut, M.; Hoßbach, C.; Albert, M.; Leo, K.; Mikolajick, T.: Barrier performance optimization of atomic layer deposited diffusion barriers for organic light emitting diodes using x-ray reflectivity investigations. In: Appl. Phys. Lett. 103, 233302 (2013)

Vasilev, B.; Bott, S.; Rzehak, R.; Liske, R.; Bartha, J. W.: A method for characterizing the pad surface texture and modeling its impact on the planarization in CMP. In: Microelectronic Engineering 104 (2013), S. 48–57

Haas, W.; Bartha, J. W.; Fischer, W.-J.; Richter, A.: Chemical microsensors based on hydrogels with adjustable measurement range . In: Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 87632Z (May 17, 2013) (2013)

Lotin, A.A.; Novodvorsky, O.A.; Khramova, O.D.; Parshina, L.S.; Lebedev, F.V.; Bartha, J.W.; Wenzel, C.: Influence of growth temperature on physical properties of ZnO films produced by pulsed laser deposition method. In: Optical Materials 35 (2013), Nr. 8, S. 1564–1570

Diese Informationen werden vom Vorgängersystem FIS bereitgestellt.

Kategorien

Journal | Konferenzen | Bücher | Patente

Zu dieser Seite

Martin Knaut
Letzte Änderung: 05.10.2022