Abschlussarbeiten - Master
Deposition and characterization of high temperature stable passivation layeers for SAW technology
Art der Abschlussarbeit
Master
Autoren
- Ahmed, Islam
Betreuer
- Prof. Dr. rer. nat. Johann Wolfgang Bartha
- Dr.-Ing. Martin Knaut
- Dipl.-Ing. Barbara Leszczynska
Weitere Betreuer
Prof. A. Delabie KU Leuven
Abstract
Due totheirthermalstability,piezoelectricsubstrateshavebeenwidelyusedfor
surface acousticwavetechnologyaswirelesstemperaturesensors.CTGSisavery
promising piezoelectricmaterialthatshowsnophasetransitionuptoitsmelting
temperature.However,operationathightemperature(600C) couldcausethe
degradation ofthemetallizationlayer(
-AlTi) responsibleforreceiving/sending
electrical signalsforthewirelesssensor.Toreducethemechanicalstressand
electrically enhancethedeviceperformance,oxidebasedALD-grownbarrierlayers
are developed.RefractiveindexandthicknessofTiO2/Al2O3 and TiO2/SiO2 based
thin filmsareinvestigatedusingspectroscopicellipsometryintheas-depositedstate
and afterheattreatmentonsiliconsubstrates.Changeofrefractiveindexcangive
information aboutthecrystallizationofthedepositedmixtureandlaminatefilms.
XPS measurementisperformedononeofthepromisingbarrierlayerstostudy
the outdiffusionfromtheCTGSsubstrate.VanderPauwmethodbasedelectrical
measurementiscarriedoutfortestingthestackelectricalresponseunderthermal
aging. Thethesisworkisconcludedbyspecifyingthechallengespresentinthisfield
and definingfutureworkplans.
surface acousticwavetechnologyaswirelesstemperaturesensors.CTGSisavery
promising piezoelectricmaterialthatshowsnophasetransitionuptoitsmelting
temperature.However,operationathightemperature(600C) couldcausethe
degradation ofthemetallizationlayer(
-AlTi) responsibleforreceiving/sending
electrical signalsforthewirelesssensor.Toreducethemechanicalstressand
electrically enhancethedeviceperformance,oxidebasedALD-grownbarrierlayers
are developed.RefractiveindexandthicknessofTiO2/Al2O3 and TiO2/SiO2 based
thin filmsareinvestigatedusingspectroscopicellipsometryintheas-depositedstate
and afterheattreatmentonsiliconsubstrates.Changeofrefractiveindexcangive
information aboutthecrystallizationofthedepositedmixtureandlaminatefilms.
XPS measurementisperformedononeofthepromisingbarrierlayerstostudy
the outdiffusionfromtheCTGSsubstrate.VanderPauwmethodbasedelectrical
measurementiscarriedoutfortestingthestackelectricalresponseunderthermal
aging. Thethesisworkisconcludedbyspecifyingthechallengespresentinthisfield
and definingfutureworkplans.
Schlagwörter
-
Berichtsjahr
2020