Laboratory equipment
PROCESSING SYSTEMS
- 5-axis CNC plasma jet system for high-rate etching processes
- 3-axis CNC plasma jet system for fine corrections
- 3-axis CNC plasma jet system for low-pressure applications
- 4-axis CNC plasma jet system for plasma polishing
- 5-axis CNC ion beam system for shape correction
- 3-axis CNC ion beam system for shape correction
- Ion beam system for reactive ion beam processes
SURFACE METROLOGY
- Aspheric stitching interferometer, QED
- Optical profilometer, LuphoScan
- Optical profilometer, Cyberscan
- Tactile profilometer, Ametek
- AFM, Semilab