Laboratory equipment

PROCESSING SYSTEMS

• 5-axis CNC plasma jet system for high-rate etching processes
• 3-axis CNC plasma jet system for fine corrections
• 3-axis CNC plasma jet system for low-pressure applications
• 4-axis CNC plasma jet system for plasma polishing
• 5-axis CNC ion beam system for shape correction
• 3-axis CNC ion beam system for shape correction
• Ion beam system for reactive ion beam processes

SURFACE METROLOGY

• Aspheric stitching interferometer, QED
• Optical profilometer, LuphoScan
• Optical profilometer, Cyberscan
• Tactile profilometer, Ametek
• AFM, Semilab