Research at the chair of Ultra-precision surface machining

The Chair focuses on fundamental research into the interaction mechanisms of chemically reactive atmospheric pressure plasma jets and low-energy ion beams with surfaces. This knowledge is used to develop deterministic processing technologies for ultra-precise shaping of optical and semiconductor surfaces up to industrial production chains. The main field of application for the technologies is the production of complex surface shapes such as aspheres and free-form surfaces for ultra-precision optics, which have to be manufactured with production tolerances of just a few nanometres.

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Insight into our fields of research

Research topics

Research focuses on fundamental investigations into particle beam-surface interaction and the development of processes and process chains for ultra-precision shaping of optical surfaces, including plasma and ion beam sources.

Lab Equipment

At the Leibniz Institute of Surface Engineering (IOM) located in Leipzig, the UPB chair has access to a comprehensive range of plasma and ion beam processing equipment as well as state-of-the-art surface measurement technology.

Das Foto zeigt einen Laptop-Monitor, auf welchem die Webseite des Forschungsinformationssystems zu sehen ist.

Publications

Together with our colleagues from Germany and abroad, we publish our research findings in scientific articles in peer-reviewed journals as well as in the form of presentations and conference papers.

Ultra-precision surface machining with ions and plasmas

The UPB Chair conducts fundamental research into the mechanisms of interaction between chemically reactive atmospheric pressure plasma jets and low-energy ion beams with surfaces and develops processing technologies for the ultra-precise shaping of surfaces through to production chains suitable for industrial use. The main field of application of the technologies is the production of complex surface shapes such as aspheres and free-form surfaces for ultra-precision optics, which must be produced with manufacturing tolerances of a few nanometers. These requirements apply to the long-wave form as well as the medium-wave structure range and micro-roughness. In order to meet these requirements, beam-based processing tools (plasma jet sources, ion beam sources) are also being further developed. The shaping and correction of surfaces requires precise measurement technology to determine shape and roughness. The working group has a comprehensive range of state-of-the-art measuring systems at its disposal for this purpose.

These research topics are addressed by the Chair at the Leibniz Institute for Surface Modification (IOM) in Leipzig.