Courses
LECTURES
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WS - Module "Nano- and Ultraprecision Technology"
Module number: MW-MB-PT-31
Teaching and learning methods: Lecture 3 SWS, practical course 1 SWS, self-study
Qualification goals: Students will have in-depth knowledge of the fundamentals of selected manufacturing processes for high technological requirements resulting from the subject areas of ultra-precision machining and nanotechnologies.
Contents: The module covers fundamental aspects of nanotechnology with regard to the production, characterization and application of nanostructures, the theoretical principles of ion- and plasma-assisted ultra-precision manufacturing processes, precision optics manufacturing processes and fields of application for ultra-precision surface processing on the nanometre scale in the areas of optics manufacturing and semiconductor technology. The module also covers the physical and chemical interaction mechanisms of particle beam-based tools, the dimensioning and design of ion beam and plasma system technology and methods of metrological characterization of ultra-precision surfaces.
Link to the OPAL learning portal:
Lecture Ultra-precision machining
Lecture Nanotechnology
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SS - Module "Photonic metrology"
Module number: MW-MB-PT-13
Teaching and learning methods: Lecture 3 SWS, practical course 2 SWS
Qualification goals: Students have advanced basic knowledge of measurement processes, measurement systems and measurement methods from measurement technology and can use light to determine physical quantities and properties.
Contents: Contents of the module are optical methods for length measurement tasks as well as the basics of characterizing surface topography (confocal microscopy, white light interferometry and laser profilometry). The module includes also other photonics-based methods such as ellipsometry and the spectroscopic method for determining properties.