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Chair of Ultra-Precision Surface Machining Using Ions and Plasmas (with IOM Leipzig)

learn more Chair of Ultra-Precision Surface Machining Using Ions and Plasmas (with IOM Leipzig)

Overview

Prof. Thomas Arnold © Prof. Thomas Arnold
Chair Holder

Prof. Dr. rer. nat. Thomas Arnold has been head of the Chair of Ultra-precision Surface Machining using Ions and Plasmas (with IOM Leipzig) since 2020, which emerged from the industry-related Endowed Professorship of Ultra-precision Machining of Surfaces using Ions and Plasmas (with IOM Leipzig). He is also head of field of research 1: Ultra-precision Surfaces at Leibniz Institute of Surface Engineering Leipzig (IOM)
Das Foto zeigt einen Laptop mit schwarzem Bildschirm, rechts daneben ein geöffnetes, leeres Notizbuch und einen daraufliegenden Stift auf einer hölzernen Oberfläche. © pexels.com
Studies

Prof. Thomas Arnold offers the module “Nano- and Ultraprecision Technology” in the winter semester and the module “Photonic Metrology” in the summer semester as part of the main study program. The proffesorship also offers the opportunity to prepare theses and dissertations in one of the chair`s research topics.

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Research

The Chair focuses on fundamental research into the interaction mechanisms of chemically reactive atmospheric pressure plasma jets and low-energy ion beams with surfaces. This knowledge is used to develop deterministic processing technologies for ultra-precise shaping of optical and semiconductor surfaces up to industrial production chains.

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The Chair

The Chair of Ultra-Precision Surface Machining Using Ions and Plasmas (UPB) focuses on the research and development of particle beam-based tools with atomic mechanisms of action and their application in processes and process chains. The aim is to produce high-precision surfaces in terms of their shape as well as waviness and micro-roughness.
The Chair is part of the Institute of Manufacturing at TUD.

The research and development work takes place mainly in the laboratories of the Leibniz Institute for Surface Modification e.V. in Leipzig.

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Address work

Visiting address:

Zeunerbau, Raum 312 George-Bähr-Str. 3c

01069 Dresden

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Address postal

Postal address:

TUD Dresden University of Technology Professur für Ultrapräzisionsbearbeitung
von Oberflächen mit Ionen und Plasmen

01062 Dresden

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