History

The Institute for Semiconductor and Microsystems Technology (IHM) emanates from the structural changes in the field of higher education at the beginning of the 90's from the technical school of Microelectronics Technology at the Faculty of Electrical Engineering at the TU Dresden. The founding year of the "technical school" is dated to the year 1980 and joint all procedural technology groups in the former section for electronics and precision technology. In the summer of 1983 related employees of the department move into a a new established laboratory building at the Nöthnitzer Straße 64, where up to today the IHM has its domicile.

In autumn 1990, the request was ask to merge the departments of Technology of Electronic Components (Prof. Dr. K. Drescher), Electronics Technology/Materials (Prof. Dr. G. Blasek) and Electronics Technology/Assembly (Prof. D. Gerber) and to establish the Institute for Semiconductor and Microsystems Technology. Further structural changes up to 1994 led to the fact that the IHM recieved two C4 professorships (department of Semiconductor Technology - Prof. K. Drescher and department of Microtechnology - Prof. W.-J. Fischer) and a C3-professorship (professorship for Device Packaging - Prof. E. Meusel). In memory to the joint founder of modern electronics and semiconductor technology, on 1st November 1993, the building at Nöthnitzer Straße 64 was named "Mierdel" building. After the retirement of Prof. Dr. K. Drescher in 1997, Prof. Dr. E. Meusel became director of the institute. The professorship for Semiconductor Technology has been retendered and was given to Prof. J.W. Bartha on 1 March 1999. Additionally, from 1st April 2003 Prof. J.W. Bartha became the director of the institute. Linked to the the retirement of Prof. Meusel his department was incorporated in a new institute for device packaging (IAVT - Prof. Dr.J. Wolter). Almost simultaneously, Prof. Dr. H. Lakner was assigned to the Professorship for Optoelectronic Components and Systems. This professorship is connected with the head of department in the Fraunhofer Institute for Photonic Microsystems (IPMS) in Dresden.

Behind the Mierdel building the cleanroom laboratory is situated and connected with the Mierdel building by a  lock bridge. The cleanroom started operation in 2006 and has 411 sqm cleanroom area. The involved departments recieved the technical prerequisites for a practical research with highly industry standard research possibilities. Moreover, the existing intensive scientific relations with the materials and natural scientists of the TU Dresden, the industry, especially with microelectronics companies in the region, as well as many other research institutions is a prerequisite for synergies to the successful development and application of micro and nanotechnology.

Since October 2009 the field of research and education at the IHM is enlarged by Prof. T. Mikolajick who holds the chair for nanoelectronic materials. Independent of his affiliation to the IHM, Prof. Mikolajick is the scientific director of the neighbouring NaMLab gGmbH, which was initially a joint venture of the TU Dresden and the Qimonda AG and became a TU Dresden associated company after the insolvency of Qimonda. The NaMLab building is located next to the Institute building on the southern edge of the campus.