Veröffentli­chungen 2011

21 bis 30 von 74 Einträgen

Parshina, L.S.; Novodvorsky, O.A.; Panchenko, V.Ya.; Khramova, O.D.; Cherebilo, Ye.A.; Lotin, A.A.; Wenzel, C.; Trumpaicka, N.; Bartha, J.W.: Photoluminescent properties of nitrogen and phosphorus doped ZnO thin films fabricated by pulsed laser deposition method. In: Laser Physics issue 4 21 (2011), Nr. 4, S. 790–795

Kirchner, R.; Teng, L.; Lu, B.; Adolphi, B.; Fischer, W.-J.: Degradation of Perfluorotrichlorosilane Antisticking Layers and the Impact on Bonded UV-Nanoimprint Molds, Mold Cleaning, and UV-Nanoimprinting. In: Proc. 23rd Internat. Microprocesses and Nanotechnology Conf., Kokura/Fukuoka, 09.-12.11 Abstracts 12D-11-99 (2011)

Kirchner, R.; Kleiner, A.; Adolphi, B.; Fischer, W.-J.: Comparison of silane monolayers on fused silica and chromium-oxi-nitride surfaces by angle resolved photoelectron spectroscopy and a new multi-layer model. In: Proc. Engineering of Functional Interfaces (EnFI), Linz, 19.-20.07 Abstracts 23 Seiten (2011)

Teng, L.; Kirchner, R.; Plötner, M.; He, J.; Jahn, A.; Hagemann, F.; Fischer, W.-J.: Fabrication and Characterization of Sub-500 nm Channel Organic Field Effect Transistor Using UV Nanoimprint Lithography With Opaque Molds. In: Proc. 37th Int. Conf. on Micro and Nano Engineering 2011 Abstracts 24 Seiten (2011)

Kirchner, R.; Adolphi, B.; Landgraf, R.; Fischer, W.-J.: Antisticking Layers on Antireflective Chromium for Hybrid (CNP) Nanoimprint Molds. In: Proc. SPIE 7545 (2011), S. 7545

Kirchner, R.; Teng, L.; Lu, B.; Adolphi, B.; Fischer, W.-J. : Degradation of Perfluorotrichlorosilane Antisticking Layers: The Impact on Mold Cleaning, UVNanoimprinting, and Bonded UV-Nanoimprint Molds. In: Jpn. J. Appl. Physics 50 (2011), S. 6–13

Geidel, M.; Knaut, M.; Albert, M.; Bartha, J.W.: In situ XPS Investigation of the Chemical Surface Composition during the ALD of ultra-thin Aluminum Oxide Films. In: IEEE 2011 Semiconductor Conference Dresden, September 27 to 28, 2011, Dresden (2011)

Albert, M.; Strobel, C.; Leszczynska, B.; Zimmermann, T.; Kuske, J.; Bartha, J.W.: Dynamic VHF-PECVD Deposition with Linear Plasma Sources for Amorphous and Microcrystalline Silicon Solar Cells. In: Society of Vacuum Coaters(SVC), Technical Conference Proceedings, Chicago 2011 (2011)

Kirchner, R.; Teng, L.; Finn, A.; Fischer, W.-J.: UV-assisted Nanoimprinting using Opaque Molds and Substrates. In: Proc. BIT’s 1st Annual Low Carbon Earth Summit 2001, Sub-conference 3: 1st Annual World Congress of Nano-Science & Technology (NANO-S&T 2011) 2 (2011), S. 715

Finn, A.; Jahn, A.; Kirchner, R.; Künzelmann, U.; He, J.; Wägner, M.; Fischer, W.-J.: Multilayer Nano-Imprint-Lithography Mold Fabrication Process. In: Proc. 3. GMM-Workshop Mikro-Nano-Integration, 2.-4.3.2011, Stuttgart, VDE Verlag GmbH GMM Fachbericht 68 (2011), S. 8–12

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Dr. Steffen Strehle
Letzte Änderung: 14.09.2016