Publications 2011

31 bis 40 von 74 Einträgen

Landgraf, R.; Finn, A.; Kirchner, R.; Haugwitz, T.; Arndt, S.; Deicke, F.; Fischer, W.-J.: Biosensor System with Polymer Microring Resonators Manufactured by Multilevel-UV-Nanoimprint. In: Proc. Mikro-System-Technik Kongress 2011 (2011)

Haugwitz, T.; Landgraf, R.; Kirchner, R.; Finn, A.; Fischer, W.-J.: Planar Optical Waveguide Design for UV-Nanoimprinted Microring Resonator Based Biosensors. In: Proc. IEEE Sensors 2011 (2011)

Kirchner, R.; Nueske, L.; Finn, A.; Lu, B.; Fischer, W.-J.: Stamp-and-Repeat UVImprinting of Spin-Coated Films: Pre-Exposure and Imprint Defects. In: Proc. 37th Int. Conf. on Micro and Nano Engineering 2011 (MNE2011), (2011)

Finn, F.; Hagemann, F.; Hensel, R.; Kirchner, R.; Jahn, A.; Fischer, W.-J.: Characterisation of the Geometrical Properties of Multilayer Nano-Imprint-Lithography Molds for Optical Applications. In: Proc. 37th Int. Conf. on Microand Nano Engineering 2011 (MNE2011) (2011)

Kirchner, R.; Finn, A.; Teng, L.; Plötner, M.; Jahn, A.; Nueske, L.; Fischer, W.-J.: UV-Nanoimprinting Using Non-Transparent Molds and Non-Transparent Substrates. In: Microelectronic Engineering, 88(8):20042008, August 2011 (2011), S. 1–5

Finn, A.; Schossig, M.; Norkus, V.; Gerlach, G.: Microstructured Surfaces on LiTaO3-Based Pyroelectric Infrared Detectors. In: IEEE Sensors Journal, 11(10):22042211, October 2011 (2011)

Pügner, T.; Knobbe, J.; Lakner, H.: Basic angles in microelectromechanical system scanning grating spectrometers. In: Applied Optics 50 (2011), Nr. 24, S. 4894–4902

Benner, F.; Tarasova, M.; Moll, P.; Jakschik, S.; Dirnstorfer, I.; Knaut, M.; Mikolajick, T.: RF-Magnetron Sputtered Dielectric Backside Passivation. In: Proceedings of the 26th European Photovoltaic Solar Energy Conference, Hamburg (2011)

Knaut, M.; Albert, M.; Bartha, J.W.: In-situ analytics for development and control of atomic layer deposition processes. In: 11th European Advanced Equipment Control/Advanced Process Control (AEC/APC) Conference (2011)

Knaut, M.; Albert, M.; Bartha, J.W.: QCM sensors for advanced process development and control. In: Proceedings of 11th AVS ALD Conference, Cambridge, Massachusetts, USA (2011)

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Dr. Steffen Strehle
Last modified: Sep 14, 2016