Publications 2011

51 bis 60 von 74 Einträgen

Wojcik, H.; Kaltofen, R.; Merkel, U.; Krien, C.; Strehle, S.; Gluch, J.; Knaut, M.; Wenzel, C.; Preusse, A.; Bartha, J.W.; Geidel, M.; Adolphi, B.; Neumann, V.; Liske, R.; Munnik, F.: Electrical Evaluation of Ru–W(-N), Ru–Ta(-N) and Ru–Mn films as Cu diffusion barriers. In: Microelectronic Engineering, Available online 27 May 2011 (2011)

Wojcik, H.; Merkel, U.; Jahn, A.; Richter, K.; Junige, M.; Klein, C.; Gluch, J.; Albert, M.; Munnik, F.; Wenzel, C.; Bartha, J.W.: Comparison of PVD, PECVD & PEALD Ru(-C) films as Cu diffusion barriers by means of bias temperature stress measurements. In: Microelectronic Engineering 88 (2011), Nr. 5, S. 641–645

Wojcik, H.; Kaltofen, R.; Krien, C.; Merkel, U.; Wenzel, C.; Bartha, J.W.; Friedemann, M.; Adolphi, B.; Liske, R.; Neumann, V.; Geidel, M.: Investigations on Ru-Mn films as plateable Cu diffusion barriers. In: In: Interconnect Technology Conference and 2011 Materials for Advanced Metallization (IITC/MAM), 2011 IEEE International, 2011 (2011), S. 1–3

Todt, U.; Hoffmann, M.; Hesse, J.; Philipp, A.; Törker, M.; May, C.; Leo, K.: The 33x33 cm² panel of the OLED100.eu project. In: LOPE-C Large-area Organic & Printed Electronics Convention 28.-30.6.2011 (2011)

Päßler, Sebastian; Fischer, Wolf-Joachim: Acoustical Method for Objective food Intake Monitoring Using a Wearable Sensor System. In: PervasiveHealth 2011 The 5th International ICST Conference on Pervasive Computing Technologies for Healthcare (2011), Nr. May 23rd - 26th, 2011, S. 1–4

Päßler, S.; Wolff, M.; Fischer, W.-J.: Food Intake Recognition Conception for Wearable Devices : First ACM MobiHoc Workshop on Pervasive Wireless Healthcare. In: MobileHealth’11 Proceedings May 16th (2011), S. 1–4

Bartha, J.W.; Knaut, M.; Junige, M.; Geidel, M.; Albert, M.: In situ monitoring for ALD process control. In: AVS 11th International Conference on Atomic Layer Deposition : June 26 – 29, 2011, Cambridge, Massachusetts, USA. Boston, 2011 (2011)

Junige, M.; Knaut, M.; Geidel, M.; Riedel, S.; Endler, I.; Wojcik, H.; Albert, M.; Merkel, U.; Bartha, J.W.: Characterization of ruthenium ALD and PVD thin films for in-situ process control by spectroscopic ellipsometry. In: 6th Workshop Ellipsometry : February 21-24, 2011 Berlin, Germany. Berlin, 2011 (2011)

Junige, M.; Knaut, M.; Geidel, M.; Albert, M.; Bartha, J.W.: In situ ellipsometric investigations during the ALD growth of Ru. In: AVS 11th International Conference on Atomic Layer Deposition : June 26 – 29, 2011, Cambridge, Massachusetts, USA. Boston, 2011 (2011)

Junige, M.; Geidel, M.; Knaut, M.; Albert, M.; Bartha, J.W.: Monitoring atomic layer deposition processes in situ and in real-time by spectroscopic ellipsometry. In: IEEE 2011 Semiconductor Conference Dresden : September 27 to 28, 2011 - Dresden, Germany. Dresden, 2011 (2011)

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Dr. Steffen Strehle
Last modified: Sep 14, 2016